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== Description of the Bosch process at the DRIE-Pegasus ==
== Description of the Bosch process at the DRIE-Pegasus ==
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== The Claritas endpoint system ==
== The Claritas endpoint system ==


This section applies to Pegasus 1.
This section applies to Pegasus 1. Too bad that it is empty so far...
 
The plasma of any dry etch process emits light as the gas constituents ( gas molecules, ions and radicals) deexcite from high energy states. Every gas molecule, ions etc. have unique vibrational and rotational energy states.
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