Specific Process Knowledge/Etch/DRIE-Pegasus/System-description: Difference between revisions
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== Description of the Bosch process at the DRIE-Pegasus == | == Description of the Bosch process at the DRIE-Pegasus == | ||
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== RF Matching == | == RF Matching == | ||
=== RF matching in general === | === RF matching in general === | ||
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== The Picoscope == | == The Picoscope == | ||
The process monitoring on Pegasus 1, 2 and 3 has been dramatically improved with the installation of the Picoscope. Click [[Specific Process Knowledge/Etch/DRIE-Pegasus/picoscope|'''HERE''']] to access a page on the Picoscope only. | The process monitoring on Pegasus 1, 2 and 3 has been dramatically improved with the installation of the Picoscope. Click [[Specific Process Knowledge/Etch/DRIE-Pegasus/picoscope|'''HERE''']] to access a page on the Picoscope only. | ||
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== The Claritas endpoint system == | == The Claritas endpoint system == | ||
This section applies to Pegasus 1. Too bad that it is empty so far... | |||