Jump to content

Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange/ProcessD/NewProcessD: Difference between revisions

← Older edit
VisualWikitext
Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,565 edits
No edit summary
Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,565 edits
No edit summary
 
(6 intermediate revisions by the same user not shown)
Line 1: Line 1:
<!--Checked for updates on 11/2-2019 - ok/jmli -->
<!--Page reviewed by jmli 9/8-2022  -->
<!--Page reviewed by jmli 28/4-2023  -->
{{Author-jmli1}}
<!--Checked for updates on 4/9-2025 - ok/jmli -->


{| border="2" cellpadding="0" cellspacing="0" style="text-align:center;"
{| border="2" cellpadding="0" cellspacing="0" style="text-align:center;"
Line 23: Line 28:
| Pegasus/jmli
| Pegasus/jmli
| 20 minute TDESC clean
| 20 minute TDESC clean
| danchip/jml/showerhead/prD/New Process D, 75 cycles or 5:00 minutes  
| nanolab/jml/showerhead/prD/New Process D, 75 cycles or 5:00 minutes  
| S004743
| S004743
! New showerhead  
! New showerhead  
|  
|  
[[file:S00743-01.jpg|150px|frameless]]
[[file:S004743-01.jpg|150px|frameless]]
[[file:S00743-02.jpg|150px|frameless]]
[[file:S004743-02.jpg|150px|frameless]]
[[file:S00743-03.jpg|150px|frameless]]
[[file:S004743-03.jpg|150px|frameless]]
[[file:S00743-04.jpg|150px|frameless]]
[[file:S004743-04.jpg|150px|frameless]]
[[file:S00743-05.jpg|150px|frameless]]
[[file:S004743-05.jpg|150px|frameless]]
[[file:S00743-06.jpg|150px|frameless]]
[[file:S004743-06.jpg|150px|frameless]]
[[file:S00743-06.jpg|150px|frameless]]
[[file:S004743-06.jpg|150px|frameless]]
[[file:S00743-07.jpg|150px|frameless]]
[[file:S004743-07.jpg|150px|frameless]]
|-
|-
|}
|}
Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Etch/DRIE-Pegasus/showerheadchange/ProcessD/NewProcessD"