Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange/ProcessD/PrD-3: Difference between revisions
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<!--Checked for updates on 11/2-2019 - ok/jmli --> | |||
<!-- Page reviewed 9/8-2022 jmli --> | |||
<!--Page reviewed by jmli 28/4-2023 --> | |||
{{Author-jmli1}} | |||
<!--Checked for updates on 4/9-2025 - ok/jmli --> | |||
{| border="2" cellpadding="0" cellspacing="0" style="text-align:center;" | {| border="2" cellpadding="0" cellspacing="0" style="text-align:center;" | ||
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| Pegasus/jmli | | Pegasus/jmli | ||
| 10 minute TDESC clean | | 10 minute TDESC clean | ||
| | | nanolab/jml/showerhead/prD/PrD-3, 150 cyc or 8:48 mins | ||
| S004781 | | S004781 | ||
! New showerhead | ! New showerhead | ||