Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange/SOI/SOI: Difference between revisions
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| Pegasus/jmli | | Pegasus/jmli | ||
| 10 minute TDESC clean | | 10 minute TDESC clean | ||
| | | nanolab/jml/showerhead/SOI/SOI, 96 cyc or 8:00 mins | ||
| | | S004745 | ||
! New showerhead | ! New showerhead | ||
| | | | ||