Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange/polySi/Cpoly5: Difference between revisions
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| 10 minute TDESC clean + 45 sec barc etch | | 10 minute TDESC clean + 45 sec barc etch | ||
| | | nanolab/jml/showerhead/Cpoly5, 20 cycles or 2:20 minutes | ||
| S004734 | | S004734 | ||
| New showerhead | | New showerhead | ||
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[[file:S004734-01.jpg|150px|frameless ]] | [[file:S004734-01.jpg|150px|frameless ]] | ||
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