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Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange/ProcessD/PrD01: Difference between revisions

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{| border="2" cellpadding="0" cellspacing="0" style="text-align:center;"
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| Pegasus/jmli
| Pegasus/jmli
| 10 minute TDESC clean
| 10 minute TDESC clean
| danchip/jml/showerhead/prD/PrD01, 110 cyc or 6:14 mins
| nanolab/jml/showerhead/prD/PrD01, 110 cyc or 6:14 mins
| S004691
| S004691
! New showerhead  
! New showerhead  
|  
|  
<gallery>
[[file:S004691-04.jpg|150px|frameless ]]
 
[[file:S004691-05.jpg|150px|frameless ]]
Image:S004691-04.jpg
[[file:S004691-06.jpg|150px|frameless ]]
Image:S004691-05.jpg
[[file:S004691-07.jpg|150px|frameless ]]
Image:S004691-06.jpg
[[file:S004691-08.jpg|150px|frameless ]]
Image:S004691-07.jpg
[[file:S004691-01.jpg|150px|frameless ]]
Image:S004691-08.jpg
[[file:S004691-02.jpg|150px|frameless ]]
Image:S004691-01.jpg
[[file:S004691-03.jpg|150px|frameless ]]
Image:S004691-02.jpg
Image:S004691-03.jpg
 
</gallery>
 
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