Specific Process Knowledge/Characterization/Profiler/Optical Profiler (Sensofar) acceptance test: Difference between revisions
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'''Feedback to this page''': '''[mailto:labadviser@ | '''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/Profiler/Optical_Profiler_(Sensofar)_acceptance_test click here]''' | ||
=<span style="color:#FF0000"> This optical profiler has been decommissioned and replaced by the S Neox system, which is very similar </span> = | |||
=Results from the Optical Profiler (Sensofar) acceptance test= | =Results from the Optical Profiler (Sensofar) acceptance test= | ||
The acceptance test was performed in January 2012 by ST Instruments and Sensofar together with | The acceptance test was performed in January 2012 by ST Instruments and Sensofar together with | ||
Pernille V. Larsen@ | Pernille V. Larsen@ DTU nanolab and Berit G. Herstrøm @ DTU nanolab. | ||
==This Table shows an overview of the acceptance tests== | ==This Table shows an overview of the acceptance tests== | ||
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*Objective: Interferometric 50x DI | *Objective: Interferometric 50x DI | ||
*Z scan: VSI | *Z scan: VSI | ||
*Light | *Light source: increased gain and contrast | ||
==Results of acceptance test no. 4== | ==Results of acceptance test no. 4== | ||
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Measurement: Depth of pattern | Measurement: Depth of pattern | ||
Standard profiler measurement: | Standard profiler measurement:335 nm | ||
Acceptance criteria:Depth within ±1% from a standard profiler measurement (331.65nm-338.35nm) and repeatability (3 successive measurements) within 0.1% | Acceptance criteria:Depth within ±1% from a standard profiler measurement (331.65nm-338.35nm) and repeatability (3 successive measurements) within 0.1% | ||
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'''Settings:''' | '''Settings:''' | ||
Two different setting were tried out, the second was the most | Two different setting were tried out, the second was the most successful: | ||
Setting no. 1: | Setting no. 1: | ||
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Acceptance criteria: Repeatability within 0.2% | Acceptance criteria: Repeatability within 0.2% | ||
Note: Because the surface roughness of the sample was very low and the noise/vibration level too high we could not obtain the specified | Note: Because the surface roughness of the sample was very low and the noise/vibration level too high we could not obtain the specified repeatability. | ||
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'''Result''' | '''Result''' | ||
*The surface roughness (Ra) was 0.5nm | *The surface roughness (Ra) was 0.5nm | ||
*The | *The repeatability over 10 measurements was 34% | ||
*The maximum deviation in roughness was 0.2nm | *The maximum deviation in roughness was 0.2nm | ||