Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch/nano14: Difference between revisions
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<!--Checked for updates on 30/7-2018 - ok/jmli --> | <!--Checked for updates on 30/7-2018 - ok/jmli --> | ||
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== The nano1.4 recipe == | == The nano1.4 recipe == | ||
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