Jump to content

Specific Process Knowledge/Etch/ICP Metal Etcher/Aluminium: Difference between revisions

VisualWikitext
Jml (talk | contribs)
Bureaucrats, danchip, Administrators
1,918 edits
Created page with "=== Aluminium etch === The aluminium etch has two steps: ; Breakthrough : The breakthrough step is designed to break through the native aluminium oxide layer that is present..."
 
Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,565 edits
No edit summary
 
(14 intermediate revisions by 4 users not shown)
Line 1: Line 1:
'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/ICP_Metal_Etcher/Aluminium click here]'''
<!--Checked for updates on 30/7-2018 - ok/jmli -->
<!--Page reviewed by jmli 9/8-2022  -->
<!--Checked for updates on 4/9-2025 - ok/jmli -->
=== Aluminium etch ===
=== Aluminium etch ===
{{Template:Author-jmli1}}
<!--Checked for updates on 2/02-2023 - ok/jmli -->


The aluminium etch has two steps:
The aluminium etch has two steps:
Line 31: Line 38:
|-
|-
! Pressure (mTorr)
! Pressure (mTorr)
| 2,  Strike 3 secs @ 15 mTorr???
| 2,  Strike 3 sec@5 mTorr
| 1
| 1
|-
|-
Line 50: Line 57:
| 30
| 30
|-
|-
!Results
|
|
|-
!Etch rate
|
|~350 nm/min (depending on features size and etch load)
|}
{| border="2" cellpadding="2" cellspacing="1" style="text-align:center;"
|+ '''Al etch''' ''made by Chantal Silvetre@nanolab October 2014''
|-
! rowspan="2" | Parameter
! colspan="2" | Process step
|-
! width="200" | Breakthrough
! width="200" | Main
|-
! Time (secs)
| 20
| 40 (variable)
|-
! HBr (sccm)
| -
| 15
|-
! Cl<sub>2</sub> (sccm)
| 20
| 25
|-
! Pressure (mTorr)
| 2,  Strike 3 secs @ 6 mTorr
| 1
|-
! Coil power (W)
| 600
| 500
|-
! Platen power (W)
| 125
| 100
|-
! Temperature (<sup>o</sup>C)
| 20
| 20
|-
! Spacers (mm)
| 100
| 100
|-
!Results
|
|
|-
!Etch rate
|
|~282 nm/min (depending on features size and etch load)
|}
|}
Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Etch/ICP_Metal_Etcher/Aluminium"