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Specific Process Knowledge/Etch/ICP Metal Etcher/Aluminium: Difference between revisions

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<!--Checked for updates on 30/7-2018 - ok/jmli -->
<!--Page reviewed by jmli 9/8-2022  -->
<!--Page reviewed by jmli 9/8-2022  -->
<!--Checked for updates on 4/9-2025 - ok/jmli -->


=== Aluminium etch ===
=== Aluminium etch ===
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|~282 nm/min (depending on features size and etch load)  
|~282 nm/min (depending on features size and etch load)  
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|}
===Al etch information supplied from STS===
[[Media:Al-etch.pdf|Al Etch Information (supplied from STS)]].
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