Specific Process Knowledge/Etch/ICP Metal Etcher/Aluminium: Difference between revisions
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=== Aluminium etch === | === Aluminium etch === | ||
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The aluminium etch has two steps: | The aluminium etch has two steps: | ||
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|~282 nm/min (depending on features size and etch load) | |~282 nm/min (depending on features size and etch load) | ||
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