Specific Process Knowledge/Etch/ICP Metal Etcher/Aluminium: Difference between revisions
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'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/ICP_Metal_Etcher/Aluminium click here]''' | '''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/ICP_Metal_Etcher/Aluminium click here]''' | ||
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=== Aluminium etch === | === Aluminium etch === | ||
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The aluminium etch has two steps: | The aluminium etch has two steps: | ||
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|~282 nm/min (depending on features size and etch load) | |~282 nm/min (depending on features size and etch load) | ||
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