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'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Etch/ICP_Metal_Etcher/Aluminium click here]'''  
'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/ICP_Metal_Etcher/Aluminium click here]'''  
 
<!--Checked for updates on 30/7-2018 - ok/jmli -->
<!--Page reviewed by jmli 9/8-2022  -->
<!--Checked for updates on 4/9-2025 - ok/jmli -->


=== Aluminium etch ===
=== Aluminium etch ===
{{Template:Author-jmli1}}
<!--Checked for updates on 2/02-2023 - ok/jmli -->


The aluminium etch has two steps:
The aluminium etch has two steps:
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|-
|-
! Pressure (mTorr)
! Pressure (mTorr)
| 2,  Strike 3 secs @ 15 mTorr???
| 2,  Strike 3 sec@5 mTorr
| 1
| 1
|-
|-
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{| border="2" cellpadding="2" cellspacing="1" style="text-align:center;"
{| border="2" cellpadding="2" cellspacing="1" style="text-align:center;"
|+ '''Al etch''' ''made by Chantal Silvetre@danchip October 2014''
|+ '''Al etch''' ''made by Chantal Silvetre@nanolab October 2014''
|-
|-
! rowspan="2" | Parameter
! rowspan="2" | Parameter
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|-
|-
! Pressure (mTorr)
! Pressure (mTorr)
| 2,  Strike 3 secs @ 15 mTorr???
| 2,  Strike 3 secs @ 6 mTorr
| 1
| 1
|-
|-
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|~282 nm/min (depending on features size and etch load)  
|~282 nm/min (depending on features size and etch load)  
|}
|}
===Al etch information supplied from STS===
[[Media:Al-etch.pdf|Al Etch Information (supplied from STS)]].
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