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'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Etch/ICP_Metal_Etcher/Titanium click here]'''  
'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/ICP_Metal_Etcher/Titanium click here]'''  
 
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=== Titanium etch ===
=== Titanium etch ===
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!Etch rate in TiO2 (nm/min)
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===TiO2 etch, tested by Evgeniy Shkondin===
Recipe used: Ti etch
[[File:TiO2_etch_Evgeniy.jpg|400px]]
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