Specific Process Knowledge/Thin film deposition/Temescal: Difference between revisions
| (One intermediate revision by the same user not shown) | |||
| Line 58: | Line 58: | ||
[[/Ion source in E-beam evaporator (Temescal)|Information on the ion source]]. | [[/Ion source in E-beam evaporator (Temescal)|Information on the ion source]]. | ||
==Equipment performance and process related parameters | ==Equipment performance and process related parameters== | ||
{| border="2" cellspacing="0" cellpadding="10" | {| border="2" cellspacing="0" cellpadding="10" | ||
| Line 112: | Line 112: | ||
| style="background:LightGrey; color:black"|Substrate material allowed | | style="background:LightGrey; color:black"|Substrate material allowed | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
* | *Almost any that does not outgas and is approved in the cleanroom. | ||
*See also the [http://labmanager.dtu.dk/function.php?module=XcMachineaction&view=edit&MachID=429 cross-contamination sheet] | *See also the [http://labmanager.dtu.dk/function.php?module=XcMachineaction&view=edit&MachID=429 cross-contamination sheet] | ||
|- | |- | ||
| style="background:LightGrey; color:black"|Material allowed on the substrate | | style="background:LightGrey; color:black"|Material allowed on the substrate | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
* | *Almost any that does not outgas and is approved in the cleanroom. | ||
*See also the [http://labmanager.dtu.dk/function.php?module=XcMachineaction&view=edit&MachID=429 cross-contamination sheet] | *See also the [http://labmanager.dtu.dk/function.php?module=XcMachineaction&view=edit&MachID=429 cross-contamination sheet] | ||
|- | |- | ||