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Specific Process Knowledge/Lithography/EBeamLithography/Cassettes: Difference between revisions

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Thope (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab347-labadviser-users-35231
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! Substrate size !! ID !! Slot ID !! Material !! Image !! Position indication !! Approximate offset [µm] !! PA to stage shift [µm]
! Substrate size !! ID !! Slot ID !! Material !! Image !! Position indication !! Approximate offset [µm] !! PA to stage shift [µm]
|-
|-
| Chips || BM4P-509 || 3A, 3B, 3C, 3D || Ti || [[image:BM4P-509_cas.png|400px]] || [[image:BM4P-509 small.png|200px]]  
| Chips || BM4P-509 || 3A, 3B, 3C, 3D || Ti || [[image:BM4P-509_cas.png|600px]] || [[image:BM4P-509 small.png|300px]]  


|| 3A: -810 µm
|| 3A: -810 µm
Line 91: Line 91:


|-
|-
| Chips || BM4P-510 || 3A, 3B, 3C, 3D || Ti || [[image:BM4P-510_cas.png|400px]] || [[image:BM4P-509 small.png|200px]] ||
| Chips || BM4P-510 || 3A, 3B, 3C, 3D || Ti || [[image:BM4P-510_cas.png|600px]] || [[image:BM4P-509 small.png|300px]] ||


|-
|-
| 2" || BM6P-006 || 2A, 2B, 2C, 2D, 2E, 2F || Al || [[image:BM6P-006_cas.png|400px]] || [[image:BM6P-502 small.png|200px]] ||
| 2" || BM6P-006 || 2A, 2B, 2C, 2D, 2E, 2F || Al || [[image:BM6P-006_cas.png|600px]] || [[image:BM6P-502 small.png|300px]] ||
|-
|-
| 2" || BM6P-502 || 2A, 2B, 2C, 2D, 2E, 2F || Ti || [[image:BM6P-502_cas.png|400px]] || [[image:BM6P-502 small.png|200px]] ||
| 2" || BM6P-502 || 2A, 2B, 2C, 2D, 2E, 2F || Ti || [[image:BM6P-502_cas.png|600px]] || [[image:BM6P-502 small.png|300px]] ||
|-
|-
| 3" || BM4P-021 || 3A, 3B, 3C, 3D || Al || [[image:BM4P-021_cas.png|400px]] || [[image:BM4P-509 small copy.png|200px]] ||
| 3" || BM4P-021 || 3A, 3B, 3C, 3D || Al || [[image:BM4P-021_cas.png|600px]] || [[image:BM4P-509 small copy.png|300px]] ||


|-
|-
| 3" || BM4P-025 || 3A, 3B, 3C, 3D || Al || [[image:BM4P-025_cas.png|400px]] || [[image:BM4P-509 small copy.png|200px]] ||
| 3" || BM4P-025 || 3A, 3B, 3C, 3D || Al || [[image:BM4P-025_cas.png|600px]] || [[image:BM4P-509 small copy.png|300px]] ||


|-
|-
| 4" || BSPCL-520 || 4A, 4B, 4C || Ti || [[image:BSPCL-520_cas.png|400px]] || [[image:BSPCL-520 small.png|200px]] ||
| 4" || BSPCL-520 || 4A, 4B, 4C || Ti || [[image:BSPCL-520_cas.png|600px]] || [[image:BSPCL-520 small.png|300px]] || Currently out of use


|-
|-
| 4" || BM2P-011 || 4D, 4E || Al || [[image:BM2P-011_cas.png|400px]] || [[image:BM2P-011 small.png|200px]] || || 4D: (330,150)
| 4" || BM2P-011 || 4D, 4E || Al || [[image:BM2P-011_cas.png|600px]] || [[image:BM2P-011 small.png|300px]] || || 4D: (330,150)


|-
|-
| 6" || BW6-009 || 6A || Al || [[image:BW6-009.png|400px]] ||  [[image:BW6-009 small.png|200px]] ||
| 6" || BW6-009 || 6A || Al || [[image:BW6-009.png|600px]] ||  [[image:BW6-009 small.png|300px]] ||
|-
|-
| 6" || BW6-042 || 6A || Al || [[image:BW6-042_cas.png|400px]] || [[image:BW6-009 small.png|200px]] ||
| 6" || BW6-042 || 6A || Al || [[image:BW6-042_cas.png|600px]] || [[image:BW6-009 small.png|300px]] ||
|-
|-
| 8" || BSPCL-514 || 8A || Ti || [[image:BPSPCL-514_cas.png|400px]] || [[image:BW6-009 small.png|200px]] ||
| 8" || BSPCL-514 || 8A || Ti || [[image:BPSPCL-514_cas.png|600px]] || [[image:BW6-009 small.png|300px]] ||
|-
|-
| Mask || B6025-025 ||  || Ti || [[image:B6025-025.png|400px]] || (140.000, 120.000) ||
| Mask || B6025-025 ||  || Ti || [[image:B6025-025.png|600px]] || (140.000, 120.000) ||
|}
|}
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