Specific Process Knowledge/Lithography/ZEP520A: Difference between revisions
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This is a standard positive resist from ZEON. The resist is very expensive; DTU Nanolab has thus stopped buying this resist. | This is a standard positive resist from ZEON. The resist is very expensive; DTU Nanolab has thus stopped buying this resist. | ||
Use CSAR instead. | Use CSAR instead. | ||
== Spin Curves == | == Spin Curves == | ||