Specific Process Knowledge/Lithography/Coaters/SprayCoater: Difference between revisions
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'''Feedback to this page''': '''[mailto:CustomerSupport@ | {{cc-nanolab}} | ||
'''Feedback to this page''': '''[mailto:CustomerSupport@Nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Lithography/Coaters/SprayCoater click here]''' | |||
==Spray Coater== | ==Spray Coater== | ||
[[image:1042_spraycoater_overview.jpg|400x239px|right|thumb|Spray Coater in | [[image:1042_spraycoater_overview.jpg|400x239px|right|thumb|Spray Coater is located in Serviceroom Cx1]] | ||
The spray coater at | The spray coater at DTU Nanolab is located in Cleanroom C-1. The machine is an ExactaCoat from Sono-tek which can be fitted with one of three different nozzles depending on the nature of the spray coating tasks at hand. The three different nozzles (Impact, AccuMist and Vortex) are optimized for different applications such as spray coating of large areas (e.g. entire wafers), smaller areas (e.g. wafer pieces or other small samples) or already structured samples that cannot be coated uniformly by spin coating. All nozzles use an ultrasonic transducer for atomizing the solution to be spray coated. It is therefore a prerequisite that all components are compatible with this process. This is the case with most substances, although process parameters may need optimization to give satisfactory results. | ||
Practically any sample that will fit inside the spray coater can be processed. Spray patterns are easily programmed either using predefined spray patterns (1D line, 2D rectangles/circles/meanders/spirals) or custom 3D spray patterns. | Practically any sample that will fit inside the spray coater can be processed. Spray patterns are easily programmed either using predefined spray patterns (1D line, 2D rectangles/circles/meanders/spirals) or custom 3D spray patterns. | ||
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'''Further information about the spray coater (manual, process log, technical information etc.) can be found in LabManger''': | '''Further information about the spray coater (manual, process log, technical information etc.) can be found in LabManger''': | ||
[http://labmanager | [http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=293 Spray coater in LabManager]''' | ||
== Process development== | |||
*[[/AZ4562|Spray coating using AZ4562]] | |||
*[[/TISpray|Spray coating using TI Spray]] | |||
==Equipment performance and process related parameters== | ==Equipment performance and process related parameters== | ||
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*Spraying imprint resists (primarily mr-NIL 6000E and mr-I 8000E | *Spraying imprint resists (primarily mr-NIL 6000E and mr-I 8000E) | ||
*Spraying photoresist (primarily AZ 4562 | *Spraying photoresist (primarily AZ-4562) | ||
*Spraying of other solutions | *Spraying of other solutions | ||
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*'''All chemicals to be spray coated must be approved specifically for spray coating''' | *'''All chemicals to be spray coated must be approved specifically for spray coating''' | ||
* | *Most non-toxic, non-particulate and non-crosslinking material likely to be approved | ||
*Suspensions challenging due to very low diameter tubing | |||
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