Specific Process Knowledge/Lithography/Resist/UserBottles: Difference between revisions
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'''Procedure for bringing new user resist bottles into the cleanroom:''' | '''Procedure for bringing new user resist bottles into the cleanroom:''' | ||
#''Outside the cleanroom'': Find a blue-cap glass bottle in the storage cabinet, next to office 055 | #''Outside the cleanroom'': Find a blue-cap glass bottle in the storage cabinet, in building 346 next to office 055 | ||
#''Gowning'': Clean the bottle in gowning | #''Gowning'': Clean the bottle in gowning | ||
#*Clean it thoroughly on the outside with water or alcohol | #*Clean it thoroughly on the outside with water or alcohol | ||
#''Fumehood'': Bring the bottle to a | #''Fumehood'': Bring the bottle to a fume hood inside the cleanroom | ||
#* Clean the bottle and the lid thoroughly on the inside with a relevant solvent, i.e for CSAR use anisole and for 5214 use | #* Clean the bottle and the lid thoroughly on the inside with a relevant solvent, i.e. for CSAR use anisole and for 5214 use acetone<br>If you are in doubt about which solvent your resist contains, consult the MSDS of the resist on [http://kemibrug.dk/searchpage/ Kemibrug] - '''requires login''' | ||
#*If you need to dilute the resist, find a measurement beaker and clean it thoroughly with the same solvent as you used for cleaning your own bottle. For CSAR, ZEP, mr EBL, and anisole-based PMMA, you can use the measurement beaker in the box inside the | #*If you need to dilute the resist, find a measurement beaker and clean it thoroughly with the same solvent as you used for cleaning your own bottle. For CSAR, ZEP, mr EBL, and anisole-based PMMA, you can use the measurement beaker in the box inside the fume hood in E-4 | ||
#Let the bottle dry in the | #Let the bottle dry in the fume hood | ||
#Take the supply resist bottle from the chemical cabinet, and place it in the | #Take the supply resist bottle from the chemical cabinet, and place it in the fume hood next to your own cleaned bottle | ||
#Carefully unscrew the lid of the resist bottle | #Carefully unscrew the lid of the resist bottle | ||
#''Only if necessary'': Wipe the thread of the resist bottle before you pour resist into your own bottle. You must wipe in such a way, that you do not create particles, which fall into the resist bottle | #''Only if necessary'': Wipe the thread of the resist bottle before you pour resist into your own bottle. You must wipe in such a way, that you do not create particles, which fall into the resist bottle | ||