Specific Process Knowledge/Lithography/EBeamLithography/2D detection system: Difference between revisions
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The dimension is given in nanometer. In the example the actual command is | The dimension is given in nanometer. In the example the actual command is | ||
'''ebimg setsize PQRef1000mu.png PQRef1000mu.tiff 1000000''' | '''ebimg setsize PQRef1000mu.png PQRef1000mu.tiff 1000000''' | ||
This will generate a TIFF file with a scale of 1000 µm. Next, this must be converted with yet another command to a .ref.gz file. The command is | This will generate a TIFF file with a scale of 1000 µm. Next, this must be converted with yet another command to a .ref.gz file. The command is | ||
'''ebimg mkref inputimage.tiff outputimage.ref.gz''' | '''ebimg mkref inputimage.tiff outputimage.ref.gz''' | ||
In our case it will be | In our case it will be | ||
'''ebimg mkref PQRef1000mu.tiff PQRef1000mu.ref.gz''' | '''ebimg mkref PQRef1000mu.tiff PQRef1000mu.ref.gz''' | ||
This will generate the actual reference image file with the correct scaling. This file should be moved to | After entering this command a window will open, showing the reference mark with a green cross indicating the center. For a symmetric mark this green cross will be in the center. It is possible to change the center point of the mark by moving the green mark with the mouse, this could be useful if an asymmetric mark is used. However, for a symmetric mark simply press "ESC" to close the window. This will generate the actual reference image file with the correct scaling. This file should be moved to | ||
'''/home/eb0/jeoleb/prm/mark''' | '''/home/eb0/jeoleb/prm/mark''' | ||
== SETWFR and CHIPAL setup == | == SETWFR and CHIPAL setup == | ||
The alignment procedure is setup using the same subprograms as usual. The only difference is that we select a different scan type. Thus, in the "Scan Condition Settings" window, in the "Scan Type" pane, we select "Arbitrary shape" instead of the usual "Cross mark". This enables the "2D" pane of the settings window. In the "2D" pane we can now set a scan size, which should be similar to the feature size or slightly larger. With the "Reference" button we can select the reference image file previously generated. | The alignment procedure is setup using the same subprograms as usual. The only difference is that we select a different scan type. Thus, in the "Scan Condition Settings" window, in the "Scan Type" pane, we select "Arbitrary shape" instead of the usual "Cross mark". This enables the "2D" pane of the settings window. In the "2D" pane we can now set a scan size, which should be similar to the feature size or slightly larger. With the "Reference" button we can select the reference image file previously generated. In this example we use a cross but as the "Arbitrary shape" scan type suggests, an arbitrary shape can be used. | ||
{| style="border: none; border-spacing: 0; margin: 1em auto; text-align: center;" | {| style="border: none; border-spacing: 0; margin: 1em auto; text-align: center;" | ||