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Specific Process Knowledge/Characterization/Hardness measurement: Difference between revisions

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'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/Hardness_measurement click here]'''
=Hardness tester=
[[Image:InnovaHardness.jpg|thumb|300x300px|Hardness tester. Positioned in cleanroom F-2]]


==Hardness measurer==
The purpose is to measure hardness of samples or films. This is done by pressing an indenter (a small pyramid-shaped diamond tip) into a sample using a known indentation force. This leaves an indent in the sample. The hardness of the sample can then be derived from the dimensions of the indentation (the softer the material the larger the indentation). The samples should have a reasonably low roughness. Otherwise it can be quite difficult to determine the hardness reliably. Also, the samples must be planar and without large protruding features.
[[Image:Thicknessmeasurer2007.jpg|thumb|300x300px|Hardness Measurer. Positioned in cleanroom F-2]]
 
The purpose is to measure hardness of samples or films.  




'''The user manual, technical information and contact information can be found in LabManager:'''
'''The user manual, technical information and contact information can be found in LabManager:'''


'''[http://www.labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=xxx Hardness measurer]'''
'''[http://www.labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=434 Equipment info for: Hardness tester]'''


==Quality Control - Recipe Parameters and Limits==
==Quality Control - Recipe Parameters and Limits==
{| border="1" cellspacing="2" cellpadding="2" colspan="3"
{| border="1" cellspacing="2" cellpadding="2" colspan="3"
|bgcolor="#98FB98" |'''Quality Control (QC) for the hardness measurer'''
|bgcolor="#98FB98" |'''Quality Control (QC) for the hardness tester'''
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The measured standard hardnesses are 2xx HV, 4xx HV and 6xx HV. The QC is performed x times a year.
There is no scheduled calibration of this machine. We do however have three calibration samples which can be used to verify proper operation of the machine. The calibration samples are also good for practicing the measurement procedure. Calibration samples are available in the following three hardnesses: 277 HV, 464 HV and 704 HV. They have been calibrated externally at 1 kgf indentation force and 10 sec indentation time.
*[http://www.labmanager.danchip.dtu.dk/d4Show.php?id=1831&mach=xxx The QC procedure]<br>
 
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==Equipment performance and process related parameters==
==Equipment performance and process related parameters==
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Purpose  
Purpose  
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Hardness measurer
Hardness tester
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*Sample thickness
*Sample hardness (Vickers)
*Film thickness
*Film hardness (Vickers)
 
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Performance
Performance
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Indent force
Available test forces
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*0,05N
*0,098 N (0,01 kgf)
*0,15N
*0,24 N (0,025 kgf)
*0,49 N (0,05 kgf)
*0,98 N (0,1 kgf)
*1,96 N (0,2 kgf)
*2,94 N (0,3 kgf)
*4,9 N (0,5 kgf)
*9,8 N (1 kgf)
*19,6 N (2 kgf)
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Data output
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*Machine can calculate hardness in HV (Hardness Vickers) and show result on display
*The integrated printer has been disabled (not cleanroom compatible)
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Substrates
Substrates
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*One sample  
*One sample  
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| style="background:LightGrey; color:black"|Substrate materials allowed
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Substrate materials allowed
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*No restrictions (besides sample must be non-toxic, dry and free from chemical residues)
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Calibration samples available
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*No restrictions (besides sample must be dry and free from chemical residues)
*277 HV 1
*464 HV 1
*704 HV 1
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