Specific Process Knowledge/Thin film deposition/Deposition of Niobium: Difference between revisions
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= Deposition of Niobium = | |||
Niobium can be deposited by e-beam evaporation or sputtering. In the chart below you can compare the deposition equipment. | Niobium can be deposited by e-beam evaporation or sputtering. In the chart below you can compare the deposition equipment. | ||
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!Pre-clean | !Pre-clean | ||
|Ar ion bombardment | |Ar ion bombardment | ||
| | |none | ||
|RF Ar clean | |RF Ar clean | ||