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Ething of Platinum can be done either wet or dry. For wet etching please see below on this page. Dry etching can be done with [[Specific Process Knowledge/Etch/IBE/IBSD Ionfab 300|IBE]] by sputtering with Ar ions.
'''Feedback to this page''': '''[mailto:wetchemistry@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/Wet_Platinum_Etch click here]'''


'''Unless anything else is stated, everything on this page, text and pictures are made by DTU Nanolab.'''
'''All links to Kemibrug (SDS) and Labmanager Including APV requires login.'''
'''All measurements on this page has been made by Nanolab staff.'''
Etching of Platinum can be done either wet or dry. For wet etching please see below on this page. Dry etching can be done with [[Specific Process Knowledge/Etch/IBE/IBSD Ionfab 300|IBE]] by sputtering with Ar ions.
==Wet Etching of Platinum==
[[Image:Fumehood1-2.jpg |300x300px|thumb|Wet Platinum Etch can be done in Fumehood 1 or 2 positioned in cleanroom D-3]]


Platinum can be etched by the following wet etch:
Platinum can be etched by the following wet etch:


*HCl : HNO<sub>3</sub> : H<sub>2</sub>O        (7 : 1 : 8) at 85 °C
*H<sub>2</sub>O : HCl : HNO<sub>3</sub>         (8 : 7 : 1) at 85 °C (note: etching starts at 70 C, 170nm etched in 5 min 70 C-85 C)* Nisoer July 2022
'''You have to be very carefully when you work with this etch. It can generate nitrous gases witch are very toxic!!'''
'''You have to be very careful when you work with this etch. It can generate nitrous gasses which are very toxic!!'''


At this moment we do not have any information on the etch rate. You should be aware that this wet etch will also etch gold and it is not possible to use any masking material, it is used as a stripper.
At this moment we do not have any information on the etch rate. You should be aware that this wet etch will also etch gold and it is not possible to use any masking material, it is used as a stripper.


Use the fumehood in cleanroom 2 for the setup. Use a glass beaker.
Wet etching of Platinum is done by making your own setup in a glass beaker in Fumehood 01 or 02 in Cleanroom D-3. Write content on the beaker and which metals has been etched with yellow permanent pen. Be aware that no other processes can be done in the fumehood at the same time.You can see the APV  [http://labmanager.dtu.dk/d4Show.php?id=4748&mach=368 here].
Write content on beaker and which metals has been etched with yellow permanent pen.


===Platinum Etch data===
===Platinum Etch data===
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|-style="background:LightGrey; color:black"
|-style="background:LightGrey; color:black"
!Link to safety APV
!Link to safety APV
|[http://labmanager.danchip.dtu.dk/d4Show.php?id=2479&mach=146 see APV here].   
|[http://labmanager.dtu.dk/d4Show.php?id=4748&mach=368 see APV/Manual here].   


|-
|-
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|-style="background:LightGrey; color:black"
|-style="background:LightGrey; color:black"
!Process temperature
!Process temperature
|85 °C
|85 °C etches at 70 C* Nisoer July 2022
|-
|-


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|-style="background:LightGrey; color:black"
|-style="background:LightGrey; color:black"
!Etch rate
!Etch rate
| Mainly used as stripper  
| 1-10 nm/min (Not tested. Mainly used as stripper)
|-
|-


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