Specific Process Knowledge/Thermal Process/RTP Jipelec 2: Difference between revisions
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'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Thermal_Process/RTP_Jipelec_2 click here]''' | '''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Thermal_Process/RTP_Jipelec_2 click here]''' | ||
[[Category: Equipment |Thermal Jipelec]] | [[index.php?title=Category:Equipment|Thermal Jipelec]] | ||
[[Category: Thermal process|Jipelec]] | [[index.php?title=Category:Thermal process|Jipelec]] | ||
=RTP2 Jipelec - Rapid Thermal Processor= | =RTP2 Jipelec - Rapid Thermal Processor= | ||
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|style="background:WhiteSmoke; color:black;" align="left"|5/6 mbar, if minimum gas flow is used during process. | |style="background:WhiteSmoke; color:black;" align="left"|5/6 mbar, if minimum gas flow is used during process. | ||
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! | ! rowspan="7" |Process time | ||
| style="background:Silver; color:black" |At 1100 <sup>o</sup>C | |||
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|style="background:Silver; color:black"|At 1100 <sup>o</sup>C | |||
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*Max. 5 minutes | *Max. 5 minutes | ||
|style="background:WhiteSmoke; color:black;" align="left"| | | style="background:WhiteSmoke; color:black;" align="left" | | ||
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|style="background:Silver; color:black"|At 1000 <sup>o</sup>C | |style="background:Silver; color:black"|At 1000 <sup>o</sup>C | ||
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*Quartz | *Quartz | ||
*Metals - ask for permisson | *Metals - ask for permisson | ||
*III-V materials - '''these cannot be heated above 450 °C,''' otherwise it can lead to outgassing of toxic gases. For that reason, '''III-V samples are limited to a maximum process temperature of | *III-V materials - '''these cannot be heated above 450 °C,''' otherwise it can lead to outgassing of toxic gases. For that reason, '''III-V samples are limited to a maximum process temperature of 400 °C.''' | ||
|style="background:WhiteSmoke; color:black;" align="left"| Always check the cross contamination information in LabManager to see whether your samples are allowed in the RTP2 Jipelec before using it. If you want to anneal sample materials that are not on the list or not approved, please contact the Thin Film group | |style="background:WhiteSmoke; color:black;" align="left"| Always check the cross contamination information in LabManager to see whether your samples are allowed in the RTP2 Jipelec before using it. If you want to anneal sample materials that are not on the list or not approved, please contact the Thin Film group | ||
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