Specific Process Knowledge/Characterization/III-V ECV-profiler: Difference between revisions
No edit summary |
|||
| (One intermediate revision by the same user not shown) | |||
| Line 12: | Line 12: | ||
ECV is a destructive technique requiring a sample size of at least 5x5mm and good skills to obtain reproduceable and reliable results. The sample is placed in a electrochemical cell and electrical contacted to form a capacitor. This is done on one side through the electrolyte and on the other side via a ohmic contact on either the front- or the backside (preferred) of the wafer. | ECV is a destructive technique requiring a sample size of at least 5x5mm and good skills to obtain reproduceable and reliable results. The sample is placed in a electrochemical cell and electrical contacted to form a capacitor. This is done on one side through the electrolyte and on the other side via a ohmic contact on either the front- or the backside (preferred) of the wafer. | ||
'''Note!''' | |||
We can only offer very limited help for this system. The ECV-profiler is not used very much and it is an old system. It has not been serviced for many years and it is very difficult (impossible) to get spare parts and technical support for it. /jehan | |||
==Equipment performance and process related parameters== | ==Equipment performance and process related parameters== | ||