Specific Process Knowledge/Thin film deposition/Deposition of AZO: Difference between revisions

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	Beyond semiconductors and optics, AZO films are utilized in UV and gas sensors, SAW/acoustoelectronic devices, transparent heaters, low-emissivity and EMI-shielding coatings, and energy-saving window stacks.		Beyond semiconductors and optics, AZO films are utilized in UV and gas sensors, SAW/acoustoelectronic devices, transparent heaters, low-emissivity and EMI-shielding coatings, and energy-saving window stacks.
	The material offers good thermal and mechanical robustness; when even lower resistance is needed, AZO is often paired with ultrathin metals in hybrid multilayers while retaining high transparency.		The material offers good thermal and mechanical robustness; when even lower resistance is needed, AZO is often paired with ultrathin metals in hybrid multilayers while retaining high transparency.