Specific Process Knowledge/Thin film deposition/Deposition of AZO: Difference between revisions
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Beyond semiconductors and optics, AZO films are utilized in UV and gas sensors, SAW/acoustoelectronic devices, transparent heaters, low-emissivity and EMI-shielding coatings, and energy-saving window stacks. | Beyond semiconductors and optics, AZO films are utilized in UV and gas sensors, SAW/acoustoelectronic devices, transparent heaters, low-emissivity and EMI-shielding coatings, and energy-saving window stacks. | ||
The material offers good thermal and mechanical robustness; when even lower resistance is needed, AZO is often paired with ultrathin metals in hybrid multilayers while retaining high transparency. | The material offers good thermal and mechanical robustness; when even lower resistance is needed, AZO is often paired with ultrathin metals in hybrid multilayers while retaining high transparency. | ||
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Atomic Layer deposition of AZO is a well-known method, where high uniformity coverage (aspect ratio over 100) can be achieved. | Atomic Layer deposition of AZO is a well-known method, where high uniformity coverage (aspect ratio over 100) can be achieved. | ||
*[[Specific Process Knowledge/Thin film deposition/ALD Picosun R200/AZO deposition using ALD|AZO]] | *[[Specific Process Knowledge/Thin film deposition/ALD Picosun R200/AZO deposition using ALD|ALD deposition of AZO]] | ||
==Sputtering of AZO== | ==Sputtering of AZO== | ||