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== Molybdenum deposition ==
== Molybdenum deposition ==
Molybdenum can be deposited by e-beam evaporation or sputtering. In the chart below you can compare the different deposition equipment.  
Molybdenum can be deposited by e-beam evaporation or sputtering. In the chart below you can compare the different deposition equipment.  
==Sputtering of Molybdenum==
Molybdenum may be sputter deposited in either the single-chamber sputter-system ("Sputter System Lesker") or the cluster-based sputter system ("[[Specific Process Knowledge/Thin film deposition/Cluster-based multi-chamber high vacuum sputtering deposition system|Sputter-System Metal-Oxide(PC1)]]" and "[[Specific Process Knowledge/Thin film deposition/Cluster-based multi-chamber high vacuum sputtering deposition system|Sputter-System Metal-Nitride(PC3)]]"). See more in link here and the chart below.
*[[Specific Process Knowledge/Thin film deposition/Deposition of Molybdenum/Mo Sputtering in Cluster Lesker PC1|Mo Sputtering in Sputter-System Metal-Oxide(PC1)]]


{| border="1" cellspacing="0" cellpadding="4"  
{| border="1" cellspacing="0" cellpadding="4"  
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! Pre-clean
! Pre-clean
|Ar ion source
|Ar ion source
|RF Ar clean
|
|RF Ar clean
|RF Ar clean
|-
|-
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
! Layer thickness
! Layer thickness
|10Å to 0.2 µm*
|10Å to 600 nm *
|10Å to 500 Å
|10Å to 500 Å
|10Å to ? ''discuss with staff''
|10Å to at least 100 nm (discuss with staff)
|-
|-
|-style="background:LightGrey; color:black"
|-style="background:LightGrey; color:black"
! Deposition rate
! Deposition rate
|1Å/s to 10Å/s
| 1Å/s to 10Å/s
| Depends on process parameters, roughly about 1 Å/s
| Depends on process parameters, roughly about 1 Å/s
| Not known yet, probably similar to 'old' Lesker sputter system
| At least up to 4 Å/s. See process log.
|-
|-
|-
|-
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'''*'''  ''Depending on the amount of heating during Mo deposition, which we will discover during process development.''
'''*'''  ''Please send a request to us if you wish to deposit more than 600 nm (write to metal@nanolab.dtu.dk)''
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