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==Sputtering of TiW==
==Sputtering of TiW==


Deposition of TiW alloy can be done in the [[Specific Process Knowledge/Thin film deposition/Wordentec|Wordentec]]. If necessary, processes may also be developed for depositing TiW in the Lesker sputter setups (contact responsible staff for this).
Deposition of TiW alloy was done in the past in the [[Specific Process Knowledge/Thin film deposition/Wordentec|Wordentec]]. This tool is now decommissioned, and if necessary processes may be developed for depositing TiW in the Lesker sputter setups (contact responsible staff for this).


*[[/Sputtering of TiW in Wordentec|Sputtering of TiW in Wordentec]]
*[[/Sputtering of TiW in Wordentec|Sputtering of TiW in Wordentec]]
*[[Specific Process Knowledge/Thin film deposition/Deposition of TiW/Sputtering of TiW in Wordentec/Grain size and uniformity of TiW layers|Results of a study on the grain size and uniformity of TiW sputtered in the Wordentec]]
*[[Specific Process Knowledge/Thin film deposition/Deposition of TiW/Sputtering of TiW in Wordentec/Grain size and uniformity of TiW layers|Results of a study on the grain size and uniformity of TiW sputtered in the Wordentec]]
{| border="1" cellspacing="0" cellpadding="4"
|-style="background:silver; color:black"
|
! Sputter deposition (Wordentec)
|-style="background:WhiteSmoke; color:black"
! General description
| Sputter deposition of TiW
|-
|-style="background:LightGrey; color:black"
! Pre-clean
|RF Ar clean
|-
|-style="background:WhiteSmoke; color:black"
! Layer thickness
|.
|-
|-style="background:LightGrey; color:black"
! Deposition rate
|Depending on process parameters, see [[/Sputtering of TiW in Wordentec|here.]]
|-
|-style="background:WhiteSmoke; color:black"
! Batch size
|
*24x2" wafers or
*6x4" wafers or
*6x6" wafers
|-
|-style="background:LightGrey; color:black"
! Allowed substrates
|
* Silicon wafers
* Quartz wafers
* Pyrex wafers
|-style="background:WhiteSmoke;  color:black"
!Allowed materials
|
* Silicon oxide
* Silicon (oxy)nitride
* Photoresist
* PMMA
* Mylar
* SU-8
* Metals
|-
|-style="background:LightGrey;  color:black"
! Comments
| TiW alloy: 10%/90% by weight
|}
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