Specific Process Knowledge/Thin film deposition/Deposition of Germanium: Difference between revisions
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==Resistive Thermal evaporation== | ==Resistive Thermal evaporation== | ||
Current process information on Ge thermal evaporation: | |||
* [[/Thermal Ge evaporation Thermal Evaporator|Resistive thermal evaporation of Ge in Thermal Evaporator - Lesker]] | * [[/Thermal Ge evaporation Thermal Evaporator|Resistive thermal evaporation of Ge in Thermal Evaporator - Lesker]] | ||
Some very instrument specific deposition parameters for a now-decommissioned tool can be found here: | Some very instrument specific deposition parameters for a now-decommissioned tool can be found here: [[/Thermal Ge deposition Wordentec|Thermal deposition of Ge in Wordentec]] | ||
==Ge deposition equipment comparison== | ==Ge deposition equipment comparison== | ||