Specific Process Knowledge/Thin film deposition/Deposition of Nickel: Difference between revisions
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*Almost any that does not degas at your intended substrate temperature. See also the [ | *Almost any that does not degas at your intended substrate temperature. See also the [https://labmanager.dtu.dk/function.php?module=XcMachineaction&view=edit&MachID=429 cross-contamination sheet] | ||
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* Almost any that do not degas. | * Almost any that do not degas. See also the [https://labmanager.dtu.dk/function.php?module=XcMachineaction&view=edit&MachID=244 cross-contamination sheet] | ||
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*Almost any that does not degas at your intended substrate temperature. See cross contamination sheets for [ | *Almost any that does not degas at your intended substrate temperature. See cross contamination sheets for [https://labmanager.dtu.dk/function.php?module=XcMachineaction&view=edit&MachID=441 PC1] and [https://labmanager.dtu.dk/function.php?module=XcMachineaction&view=edit&MachID=442 PC3] | ||
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==Quality control of e-beam evaporated Ni films== | ==Quality control of e-beam evaporated Ni films== | ||
{| border="1" cellspacing="2" cellpadding="2" colspan="3" | {| border="1" cellspacing="2" cellpadding="2" colspan="3" | ||
|bgcolor="#98FB98" |'''Quality control (QC) for the Temescal''' | |bgcolor="#98FB98" |'''Quality control (QC) for the E-beam Evaporator (Temescal) and the E-beam Evaporator (10-pockets)''' | ||
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Nickel deposition is tested occasionally, around 1 time per year. LabManager links require login | Nickel deposition is tested occasionally, around 1 time per year in each machine. You are welcome to contact staff to request an extra test of the material. | ||
*[http://labmanager.dtu.dk/d4Show.php?id=5862&mach=429 QC procedure for the Temescal | |||
*[https://labmanager.dtu.dk/view_binary.php?type=data&mach=429 The newest QC data for the Temescal | '''LabManager links to procedures and data''' (require login): | ||
*[http://labmanager.dtu.dk/d4Show.php?id=5862&mach=429 QC procedure for the E-beam Evaporator (Temescal)]<br> | |||
*[https://labmanager.dtu.dk/view_binary.php?type=data&mach=429 The newest QC data for the E-beam Evaporator (Temescal)]<br> | |||
*[http://labmanager.dtu.dk/d4Show.php?id=5862&mach=511 QC procedure for the E-beam Evaporator (10-pockets)]<br> | |||
*[https://labmanager.dtu.dk/view_binary.php?type=data&mach=511 The newest QC data for the E-beam Evaporator (10-pockets)]<br> | |||
{| {{table}} | {| {{table}} | ||
| align=" | | align="left" valign="top"| | ||
{| border=" | {| border="2" cellspacing="1" cellpadding="2" align="left" style="width:400px" | ||
! QC Recipe: | ! QC Recipe: | ||
! Standard recipes/Ni | ! Standard recipes/Ni | ||
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|Deposition rate | |Deposition rate | ||
| | |2 Å/s | ||
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|Thickness | |Thickness | ||
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|} | |} | ||
| align=" | |- | ||
{| border="2" cellspacing="1" cellpadding="2" align=" | |} | ||
{| {{table}} | |||
| align="left" valign="top"| | |||
{| border="2" cellspacing="1" cellpadding="2" align="left" style="width:400px" | |||
!QC limits | !QC limits | ||
! | !Both E-beam Evaporators | ||
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|Deposition rate deviation | |Deposition rate deviation | ||
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|} | |} | ||
Thickness is measured in 5 points with a stylus profiler. <br> | |||
Thickness is measured in 5 points with a stylus profiler (usually DektakXT). <br> | |||
|} | |} | ||