Specific Process Knowledge/Thin film deposition/Deposition of Ruthenium: Difference between revisions
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== Deposition of Ru == | == Deposition of Ru == | ||
Ruthenium can be deposited by e-beam evaporation or sputtering. In the chart below you can compare the different deposition equipment: | Ruthenium can be deposited by e-beam evaporation or sputtering. In the chart below you can compare the different deposition equipment: | ||
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! Comment | ! Comment | ||
|Please contact the thin film group before depositing Ru, even if Ru is in the machine. | |'''Please contact the thin film group before depositing Ru, even if Ru is in the machine.''' | ||
The current target material belongs to a specific customer. | The current target material belongs to a specific customer. | ||
Ru exhibits high stress as-deposited and has poor adhesion to Si with native oxide. | |||
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