Specific Process Knowledge/Wafer Information

Overview of Wafers available in the Cleanroom (B346)

DTU Nanolab has a stock of standard silicon and glass wafers as well as well as somes wafers pre-processed in one of our thermal furnaces. They can be purchased through LabManager (requires login).

The most commonly used wafers are located in the wafer cabinet called "B1 cage" (located inside the cleanroom, in room B1). Other substrates have to be purchased personally, though you are very welcome to ask us for help if needed.

A full list of wafers can be found in the Wafer Shop in Labmanager. The typical specifications of our standard wafers are listet below. More detailed specifications for each substrate available at DTU Nanolab can be found as pdf-file attched to the respective substrate in the Wafer Shop in Labmanager.

Wafers available in the cleanroom
	Size	Type	Thickness	Resistivity
SSP1	2"	P	500 µm	1-20 Ωcm
SSP1	4"	N or P	525 µm	1-20 Ωcm
SSP1	6"	N	625 µm	10-20 Ωcm
SSP1	8"	N	725 µm	1-10 Ωcm
DSP2	4"	N or P	350 µm	1-20 Ωcm
DSP2	4"	N	500 µm	1-20 Ωcm
DSP2	6"	N	500 µm	1-20 Ωcm
Fused silica wafers	4"		500 µm or 1 mm
Boron glass wafers	4"		500 µm
pre-processed3	4" and 6"

¹ SSP: single side polished
² DSP: double side polished
³ Pre-processed wafers are wafers with various thicknesses of thermal oxides, LPCVD nitrides and Poly Si. More details in the Wafer Shop.

The name on the wafer boxes consists typically of a few letters and a number, eg OP337:

waferbox name OP337
O	P	337
Indicates the company where the wafers are bought	Type of doping in the wafer	shipment number

How to Purchase Wafers

To buy wafers from DTU Nanolab, you need to login to Labmanager and find the Wafer Shop. Here you can see a list of wafers that we have on stock. Most of these are in the cabinet, called "B1 cage" (located inside the cleanroom, in room B1). Some of the wafers are stored in our basement and you need to contact DTU Nanolab personnel to buy these (in advance). In the list you can see the specifications, prices, as well as a link to more detailed information about the wafer specifications. Be sure that the wafers you want to buy in the shop are actually available in the cabinet before buying. After you bought the wafers in LabManger, the door to "B1 cage" will unlock for 30 seconds. The door can be opened by twisting the handle counter clock wise. Please leave the door open while taking the wafers you have bought from the box. Afterwards, place the wafer box back into the cupboard and close the door. This will enable door lock again.

Please note, when taking new wafers always use the dedicated vacuum tweezer hanging on the wall labeled "Wafer Shop Tweezer".

If you buy wafers that must go directly from the new wafer box into any of the LPCVD furnaces or Furnace: Anneal-oxide(C1), buy one wafer less than what you need. Take the wafer box from the wafer cabinet to the furnace and close and lock the door again. Once you have loaded your wafers into the furnace, buy the remaining wafer to unlock the cage door again. Place the wafer box back into the cage and close the door.

Wafer boxes and Single Wafer Carriers

In the gowning, used but cleaned single wafer carriers and wafer boxes can be found. Those have been washed in the dishwasher with special soap and deionized water and air dried.

Please note, re-used/washed wafer boxes and single wafer holder are considered (mostly) clean. They are not clean enough to be used as carrier for transport of wafers between RCA and furnace or between furnaces.

New, clean single wafer carriers can be found in the gowning area in the metal cage. Please contact DTU Nanolab personnel for help, if the stock is low. An empty wafer box placed on top of the B1 cage is considered clean as well. Those wafer boxes can be used to store wafers from RCA to furnace or between furnaces.