Specific Process Knowledge/Process Flow: Difference between revisions
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=The Process Flow= | =The Process Flow= | ||
A Process Flow contains the sequence of steps and techniques used to create certain structures and devices at the microscopic and nanoscopic scales. This involves a combination of various fabrication methods and inspection techniques to achieve the desired features and functionalities. | A Process Flow contains the sequence of steps and techniques used to create certain structures and devices at the microscopic and nanoscopic scales. This involves a combination of various fabrication methods and inspection techniques to achieve the desired features and functionalities. | ||
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Below are some recommendations on how to set up a process flow and more information on the different parts of a process flow, including an overview of various process steps. You can then find more detailed information about equipment, processes and materials available on the specific subpages. We also recommended to have a look at the process log on [https://labmanager.dtu.dk/ www.labmanager.dtu.dk] for the specific machine to check which process parameters or programs other users (f.ex. group members) are using. | Below are some recommendations on how to set up a process flow and more information on the different parts of a process flow, including an overview of various process steps. You can then find more detailed information about equipment, processes and materials available on the specific subpages. We also recommended to have a look at the process log on [https://labmanager.dtu.dk/ www.labmanager.dtu.dk] for the specific machine to check which process parameters or programs other users (f.ex. group members) are using. | ||
You might also have special requirements in your process flow. Please find below a short description of how to get approval for new chemicals or processes. | |||
If you are a new user to DTU Nanolab and you have issues on how to get started in our cleanroom, please have a look at following pages in labadviser: '''[[LabAdviser/Safety|"Safety"]]''' and '''[[Specific Process Knowledge/Getting Started|"Getting Started"]]'''. | If you are a new user to DTU Nanolab and you have issues on how to get started in our cleanroom, please have a look at following pages in labadviser: '''[[LabAdviser/Safety|"Safety"]]''' and '''[[Specific Process Knowledge/Getting Started|"Getting Started"]]'''. | ||
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You can download a process flow template below and fill it in with your own information. Of course, you are also welcome to make your own template. You are also welcome to take a look at our example for the fabrication of a simple solar cell. It shows you how to build up a process flow for a component that can be made at DTU Nanolab. Throughout the example, you can find links to relevant pages in LabAdviser where information about the different processes are given. Please note that there is also a possibility to create a process flow in Labmanger using the [http://labmanager.dtu.dk/function.php?module=Flow&view=editflow Flow editor].<br> | You can download a process flow template below and fill it in with your own information. Of course, you are also welcome to make your own template. You are also welcome to take a look at our example for the fabrication of a simple solar cell. It shows you how to build up a process flow for a component that can be made at DTU Nanolab. Throughout the example, you can find links to relevant pages in LabAdviser where information about the different processes are given. Please note that there is also a possibility to create a process flow in Labmanger using the [http://labmanager.dtu.dk/function.php?module=Flow&view=editflow Flow editor].<br> | ||
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Process flow template: [[Media:Process flow template v3.1.docx|Process_flow_template_v3.1.docx]] | |||
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Process flow example: [[LabAdviser/Process Flow/Solar cell process flow|Solar Cell Process flow]] | |||
<br>In the following | <br>In the following sections, you can find some guidelines and relevant information for creating your own process flow, such as relevant information about substrate, pattern design and mask fabrication, as well as process steps and characterization methods. | ||
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| width="150" align="center" style="color:black"| Characterize your Sample[[image:JehanCharacterize.png|130px|frameless|link=Specific Process Knowledge/Characterization]] | | width="150" align="center" style="color:black"| Characterize your Sample[[image:JehanCharacterize.png|130px|frameless|link=Specific Process Knowledge/Characterization]] | ||
| width="150" align="center" style="color:black"| Cut & Pack your Sample (Backend) <br> <br> [[image:JehanPack.png|130px|frameless|link=Specific Process Knowledge/Back-end processing|Back-end processing, also called Assembly and Packaging, are typical processes used to finish up the wafer/chip fabrication, f.ex. wafer thinning, dicing into chips, bonding to a carrier and connecting it with wires to a printed circuit board (PCB).]] | | width="150" align="center" style="color:black"| Cut & Pack your Sample (Backend) <br> <br> [[image:JehanPack.png|130px|frameless|link=Specific Process Knowledge/Back-end processing|Back-end processing, also called Assembly and Packaging, are typical processes used to finish up the wafer/chip fabrication, f.ex. wafer thinning, dicing into chips, bonding to a carrier and connecting it with wires to a printed circuit board (PCB).]] | ||
| width="150" align="center" style="color:black"| Process Flow Examples [[image:Processflow b.png|130px|frameless|link= | | width="150" align="center" style="color:black"| Process Flow Examples [[image:Processflow b.png|130px|frameless|link=LabAdviser/Process Flow/Solar cell process flow|We have made the process flow for a simple solar cell available. It shows you how to build up a process flow for a component that can be made at DTU Nanolab.]] | ||
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== Characterization == | == Characterization == | ||
A crucial and often neglected part of each process flow is the characterization. After critical process steps you might need to analyze and measure the properties of produced structures, layers, materials or entire devices. Characterization techniques help you ensure that the fabricated components meet the required specifications and function correctly. There are many tools and methods available to inspect, analyze and measure the properties of features and materials such as physical, chemical, electrical, and mechanical properties. | A crucial and often neglected part of each process flow is the characterization. After critical process steps you might need to analyze and measure the properties of produced structures, layers, materials or entire devices. Characterization techniques help you ensure that the fabricated components meet the required specifications and function correctly. There are many tools and methods available to inspect, analyze and measure the properties of features and materials such as physical, chemical, electrical, and mechanical properties. | ||
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Below we will try to sum up some of the more typical characterization methods, but for now, please have a look at the [[Specific Process Knowledge/Characterization | '''Characterization''']] page. | |||
<span style="background:#FF2800">THIS PART IS UNDER CONSTRUCTION</span> | |||
=== Surface Toppography === | === Surface Toppography === | ||
''Analysis of form, shape, size, structure, and surface features including surface roughness, f.ex'' | ''Analysis of form, shape, size, structure, and surface features including surface roughness, f.ex'' | ||
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== Special Requirements == | == Special Requirements == | ||