Specific Process Knowledge/Characterization: Difference between revisions
mNo edit summary |
mNo edit summary |
||
| (One intermediate revision by the same user not shown) | |||
| Line 144: | Line 144: | ||
===Electrical measurements=== | ===Electrical measurements=== | ||
*[[/ | *[[/Four-Point Probe|4-Point Probe]] | ||
*[[/Probe station|Probe station]] | *[[/Probe station|Probe station]] | ||
*[[/III-V ECV-profiler|III-V ECV-profiler (Electrochemical Capacitance-Voltage carrier density profiler)]] | *[[/III-V ECV-profiler|III-V ECV-profiler (Electrochemical Capacitance-Voltage carrier density profiler)]] | ||
| Line 202: | Line 202: | ||
==Decommissioned equipment== | ==Decommissioned equipment== | ||
*[[/KLA-Tencor Surfscan 6420|KLA-Tencor Surfscan 6420]] | *[[/KLA-Tencor Surfscan 6420|KLA-Tencor Surfscan 6420]] | ||
*[[/X-Ray Diffractometer|Phillips X-Ray Diffractometer | *[[/X-Ray Diffractometer|Phillips X-Ray Diffractometer (owned by DTU Fotonik)]] | ||