Specific Process Knowledge/Characterization: Difference between revisions
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| width="30" align="center" style="writing-mode: vertical-lr; transform: rotate(180deg);background:#f0f0f0;"|[[Specific_Process_Knowledge/Characterization/XPS|XPS]] | | width="30" align="center" style="writing-mode: vertical-lr; transform: rotate(180deg);background:#f0f0f0;"|[[Specific_Process_Knowledge/Characterization/XPS|XPS]] | ||
| width="30" align="center" style="writing-mode: vertical-lr; transform: rotate(180deg);background:#f0f0f0;"|[[Specific_Process_Knowledge/Characterization/PL_mapper|PL mapper]] | | width="30" align="center" style="writing-mode: vertical-lr; transform: rotate(180deg);background:#f0f0f0;"|[[Specific_Process_Knowledge/Characterization/PL_mapper|PL mapper]] | ||
| width="30" align="center" style="writing-mode: vertical-lr; transform: rotate(180deg);background:#f0f0f0;"|[[ | | width="30" align="center" style="writing-mode: vertical-lr; transform: rotate(180deg);background:#f0f0f0;"|[[Specific Process Knowledge/Characterization/Four-Point Probe|4-point probe]] | ||
| width="30" align="center" style="writing-mode: vertical-lr; transform: rotate(180deg);background:#f0f0f0;"|[[Specific_Process_Knowledge/Characterization/Probe_station|Probe station]] | | width="30" align="center" style="writing-mode: vertical-lr; transform: rotate(180deg);background:#f0f0f0;"|[[Specific_Process_Knowledge/Characterization/Probe_station|Probe station]] | ||
| width="30" align="center" style="writing-mode: vertical-lr; transform: rotate(180deg);background:#f0f0f0;"|[[Specific_Process_Knowledge/Characterization/XRD|XRD]] | | width="30" align="center" style="writing-mode: vertical-lr; transform: rotate(180deg);background:#f0f0f0;"|[[Specific_Process_Knowledge/Characterization/XRD|XRD]] | ||
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<br clear="all"> | <br clear="all"> | ||
<sup>{{fn|1}}</sup> Using the cross section method<br> | |||
<sup> | |||
<sup>{{fn|2}}</sup> Using the create step method<br> | <sup>{{fn|2}}</sup> Using the create step method<br> | ||
<sup>{{fn|3}}</sup> With known resistivity<br> | <sup>{{fn|3}}</sup> With known resistivity<br> | ||
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===Electrical measurements=== | ===Electrical measurements=== | ||
*[[/ | *[[/Four-Point Probe|4-Point Probe]] | ||
*[[/Probe station|Probe station]] | *[[/Probe station|Probe station]] | ||
*[[/III-V ECV-profiler|III-V ECV-profiler (Electrochemical Capacitance-Voltage carrier density profiler)]] | *[[/III-V ECV-profiler|III-V ECV-profiler (Electrochemical Capacitance-Voltage carrier density profiler)]] | ||
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===SEMs at DTU Nanolab - building 307/314=== | ===SEMs at DTU Nanolab - building 307/314=== | ||
<!-- *[[LabAdviser/CEN/Quanta 3D FIB/SEM|FIB-SEM FEI QUANTA 200 3D]] --> | <!-- *[[LabAdviser/CEN/Quanta 3D FIB/SEM|FIB-SEM FEI QUANTA 200 3D]] --> | ||
*[[LabAdviser/ | *[[LabAdviser/314/Microscopy 314-307/FIB/Helios|Dual Beam FEI Helios Nanolab 600]] | ||
*[[LabAdviser/ | *[[LabAdviser/314/Microscopy 314-307/SEM/Nova|SEM FEI Nova 600 NanoSEM]] | ||
*[[LabAdviser/ | *[[ | ||
LabAdviser/314/Microscopy 314-307/SEM/QFEG|SEM FEI Quanta 200 ESEM FEG]] | |||
<!-- *[[LabAdviser/CEN/Inspect S|SEM Inspect S]] --> | <!-- *[[LabAdviser/CEN/Inspect S|SEM Inspect S]] --> | ||
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===TEMs at DTU Nanolab - building 307/314=== | ===TEMs at DTU Nanolab - building 307/314=== | ||
*[[LabAdviser/ | *[[LabAdviser/314/Microscopy 314-307/TEM/ATEM |Titan ATEM]] | ||
*[[LabAdviser/ | *[[LabAdviser/314/Microscopy 314-307/TEM/ETEM |Titan ETEM]] | ||
*[[LabAdviser/ | *[[LabAdviser/314/Microscopy 314-307/TEM/T20 |Tecnai TEM]] | ||
===XRD=== | ===XRD=== | ||
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==Decommissioned equipment== | ==Decommissioned equipment== | ||
*[[/KLA-Tencor Surfscan 6420|KLA-Tencor Surfscan 6420]] | *[[/KLA-Tencor Surfscan 6420|KLA-Tencor Surfscan 6420]] | ||
*[[/X-Ray Diffractometer|Phillips X-Ray Diffractometer | *[[/X-Ray Diffractometer|Phillips X-Ray Diffractometer (owned by DTU Fotonik)]] | ||