Specific Process Knowledge/Cleanroom Chemicals: Difference between revisions
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=Chemicals in the Cleanroom (B346)= | |||
=Acids and | <span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION.</span> | ||
*BHF (Mixture of Ammonium fluoride, Ammonium bi fluoride, Hydroflouric acid) | |||
*BOE 7:1 without surfactant (Mixture of Ammonium fluoride, | This page lists the chemicals that are made available in the cleanroom by Nanolab, covered by the cleanroom access hourly rate. | ||
*BOE 7:1 with surfactant (Mixture of Ammonium fluoride, | |||
*HF 5% | =Acids, bases, and etchants= | ||
*HF 40% | *Ammonia solution 28%. Stored in D-3? | ||
*Nitric acid 69% | *Ammonium persulphate (Powder). Stored in D-3. | ||
*BHF (Mixture of Ammonium fluoride, Ammonium bi fluoride, Hydroflouric acid). Stored in D-3. | |||
*BOE 7:1 without surfactant (Mixture of Ammonium fluoride, Ammonium bifluoride, Hydroflouric acid). Stored in D-3. | |||
*BOE 7:1 with surfactant (Mixture of Ammonium fluoride, Ammonium bifluoride, Hydroflouric acid). Stored in D-3. | |||
*Boric acid. Stored in D-3? | |||
*Chrome ETCH 18 (Mixture of Ceric ammonium nitrate, Perchloric acid, Nitric acid). Stored in Bx1. | |||
*HF 5%. Stored in D-3? | |||
*HF 40%. Stored in D-3? | |||
*Hydrochloric acid 37%. Stored in D-3. | |||
*Hydrogen peroxide 31%. Stored in D-3. | |||
*Nitric acid 69%. Stored in D-3. | |||
*Phosphoric acid 85%. Stored in D-3. | |||
*Potassium hydroxide (Pellets). Stored in D-3. | |||
*Potassium hydroxide 50%. Stored in D-3. | |||
*Sulfamic acid. Stored in D-3? | |||
*Sulfuric acid 96%. Stored in D-3. | |||
=Developers= | =Developers= | ||
AR 600-546 (Amyl acetate) | *AR 600-546 (Amyl acetate). Stored in E-4 | ||
AZ 351B (NaOH based) | *AZ 351B (NaOH based with disodium tetraborate buffer). Stored in E-4. | ||
AZ 726 MIF (TMAH based) | *AZ 726 MIF (TMAH based with surfactants added for fast and homogeneous substrate wetting). Stored in E-4. | ||
ZED-N50 (n-Amylacetate) | *mr-Dev 600 (PGMEA). Stored in Bx1. Or E-4? | ||
*ZED-N50 (n-Amylacetate). Stored in E-4. | |||
=Resists= | =Resists= | ||
*AR-P 6200.09 | *AR-P 6200.09. Stored in E-4. | ||
*DUV42S-6 (BARC for stepper) | *AZ 4562. Stored in E-4, small bottle in E-5. | ||
*SU-8 2005 | *AZ 5214E. Stored in E-4, small bottle in E-5. | ||
*SU-8 2035 | *AZ nLOF 2020. Stored in E-4, small bottle in E-5. | ||
*SU-8 2075 | *AZ MiR 701 (29cps). Stored in E-4, small bottle in E-5. | ||
*DUV42S-6 (BARC for stepper). Stored in E-4. | |||
*KRF M230Y 6cp. Stored in E-4. | |||
*KRF M35G 27cp. Stored in E-4. | |||
*SU-8 2005. Stored in C-1. | |||
*SU-8 2035. Stored in C-1. | |||
*SU-8 2075. Stored in C-1. | |||
=Solvents= | =Solvents= | ||
* | *2-Propanol "IPA". Stored in C-1, D-3, E-4. | ||
*Acetone | *Acetone. Stored in C-1, D-3, E-4. | ||
*Anisole | *Anisole. Stored in E-4. | ||
*AR 600-71 (Mixture of Dioxolane, PGME) | *AR 600-71 (Mixture of Dioxolane, PGME). Stored in E-4. | ||
*A-Thinner (Anisole) | *A-Thinner (Anisole). Stored in E-4. | ||
*Ethanol | *Ethanol. Stored in C-1, D-3, E-4. | ||
* | *MIBK. Stored in E-4. | ||
* | *PGMEA (available as mr-Dev 600). Stored in Bx1. Or E-4? | ||
* | *Remover 1165 (NMP). Stored in D-3, E-4. | ||
=Other chemicals= | =Other chemicals= | ||
*HMDS | *HMDS. Stored in E-4. | ||
=Missing from list?= | |||
*AP3000? | |||
*APS-100 (Ammonium persulfate based copper etch)? | |||
*AZ 400K (KOH based with Potassium borate buffer)? | |||
*Ethyl Acetate? | |||
*HSQ? | |||
*Rinse T1100 (Mixture of Mesitylin, 1,2,4-Trimethylbenzene)? | |||
*UVN2300? | |||