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'''THIS PAGE IS UNDER CONSTRUCTION''' [[Image:section under construction.jpg|70px]]
=Chemicals in the Cleanroom (B346)=


=Acids and bases=
<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION.</span>
 
This page lists the chemicals that are made available in the cleanroom by Nanolab, covered by the cleanroom access hourly rate.
 
=Acids, bases, and etchants=
*Ammonia solution 28%. Stored in D-3?
*Ammonium persulphate (Powder). Stored in D-3.
*BHF (Mixture of Ammonium fluoride, Ammonium bi fluoride, Hydroflouric acid). Stored in D-3.
*BOE 7:1 without surfactant (Mixture of Ammonium fluoride, Ammonium bifluoride, Hydroflouric acid). Stored in D-3.
*BOE 7:1 with surfactant (Mixture of Ammonium fluoride, Ammonium bifluoride, Hydroflouric acid). Stored in D-3.
*Boric acid. Stored in D-3?
*Chrome ETCH 18 (Mixture of Ceric ammonium nitrate, Perchloric acid, Nitric acid). Stored in Bx1.
*HF 5%. Stored in D-3?
*HF 40%. Stored in D-3?
*Hydrochloric acid 37%. Stored in D-3.
*Hydrogen peroxide 31%. Stored in D-3.
*Nitric acid 69%. Stored in D-3.
*Phosphoric acid 85%. Stored in D-3.
*Potassium hydroxide (Pellets). Stored in D-3.
*Potassium hydroxide 50%. Stored in D-3.
*Sulfamic acid. Stored in D-3?
*Sulfuric acid 96%. Stored in D-3.


=Developers=
=Developers=
 
*AR 600-546 (Amyl acetate). Stored in E-4
=Etchants=
*AZ 351B (NaOH based with disodium tetraborate buffer). Stored in E-4.
*AZ 726 MIF (TMAH based with surfactants added for fast and homogeneous substrate wetting). Stored in E-4.
*mr-Dev 600 (PGMEA). Stored in Bx1. Or E-4?
*ZED-N50 (n-Amylacetate). Stored in E-4.


=Resists=
=Resists=
*AR-P 6200.09. Stored in E-4.
*AZ 4562. Stored in E-4, small bottle in E-5.
*AZ 5214E. Stored in E-4, small bottle in E-5.
*AZ nLOF 2020. Stored in E-4, small bottle in E-5.
*AZ MiR 701 (29cps). Stored in E-4, small bottle in E-5.
*DUV42S-6 (BARC for stepper). Stored in E-4.
*KRF M230Y 6cp. Stored in E-4.
*KRF M35G 27cp. Stored in E-4.
*SU-8 2005. Stored in C-1.
*SU-8 2035. Stored in C-1.
*SU-8 2075. Stored in C-1.


=Solvents=
=Solvents=
*2-Propanol "IPA". Stored in C-1, D-3, E-4.
*Acetone. Stored in C-1, D-3, E-4.
*Anisole. Stored in E-4.
*AR 600-71 (Mixture of Dioxolane, PGME). Stored in E-4.
*A-Thinner (Anisole). Stored in E-4.
*Ethanol. Stored in C-1, D-3, E-4.
*MIBK. Stored in E-4.
*PGMEA (available as mr-Dev 600). Stored in Bx1. Or E-4?
*Remover 1165 (NMP). Stored in D-3, E-4.
=Other chemicals=
*HMDS. Stored in E-4.
=Missing from list?=
*AP3000?
*APS-100 (Ammonium persulfate based copper etch)?
*AZ 400K (KOH based with Potassium borate buffer)?
*Ethyl Acetate?
*HSQ?
*Rinse T1100 (Mixture of Mesitylin, 1,2,4-Trimethylbenzene)?
*UVN2300?
Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Cleanroom_Chemicals"