LabAdviser/Courses: Difference between revisions
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= Tool Package Training (TPT) = | = Tool Package Training (TPT) = | ||
For selected equipment groups, we | For selected equipment groups, we have created online introductory courses called Tool Package Training (TPT) that provide a comprehensive overview of both the theoretical principles behind the processes and the equipment used. These courses also include video demonstrations showcasing the operation of the equipment available in our cleanroom facilities. The completion of the respective TPTs are mandatory for all academic users before hands-on training on specific equipment can be requested. While we strongly recommend commercial users to take the online courses as well, only the video demonstrations showcasing the operation of the equipment are mandatory. | ||
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!SEM TPT | !SEM TPT | ||
|for getting access to SEMs in [https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Characterization/SEM:_Scanning_Electron_Microscopy 346] and [https://labadviser.nanolab.dtu.dk/index.php?title=LabAdviser/314/Microscopy_314-307 314/307] | |for getting access to SEMs in [https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Characterization/SEM:_Scanning_Electron_Microscopy 346] and [https://labadviser.nanolab.dtu.dk/index.php?title=LabAdviser/314/Microscopy_314-307 314/307] | ||
|This online course presents the theory about scanning electron microscopy, as well as training in equipment operation. The course is a prerequisite for hands-on training on any of the SEMs in building 314/307, and 346 at DTU Nanolab. Find more information on the [https://labadviser.nanolab.dtu.dk/index.php?title=LabAdviser/Courses/TPT_SEM SEM TPT] and sign up [https://www.nanolab.dtu.dk/access/cleanroom-access/equipment-training/scanning-electron-microscopy-sem here]. | |This online course presents the theory about scanning electron microscopy, as well as training in equipment operation. The course is a prerequisite for hands-on training on any of the SEMs in building 314/307, and 346/347 at DTU Nanolab. Find more information on the [https://labadviser.nanolab.dtu.dk/index.php?title=LabAdviser/Courses/TPT_SEM SEM TPT] and sign up [https://www.nanolab.dtu.dk/access/cleanroom-access/equipment-training/scanning-electron-microscopy-sem here]. | ||
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!E-beam Lithography | !E-beam Lithography | ||
|for getting access to [[Specific Process Knowledge/Lithography/EBeamLithography | E-beam Lithography Tools]] | |for getting access to [[Specific Process Knowledge/Lithography/EBeamLithography | E-beam Lithography Tools]] | ||
|This online tutorial will be part of the E-beam TPT and is currently under prepration. It will include theory on electron beam lithography and equipment, as well as training in preparation of exposure files and equipment operation. The course | |This online tutorial will be part of the E-beam TPT and is currently under prepration. <!-- ADDED WHEN TPT IS READY: It will include theory on electron beam lithography and equipment, as well as training in preparation of exposure files and equipment operation.!--> The course is a prerequisite for hands-on training on the electron beam tool. Find more information about the training in the [[LabAdviser/Courses/TPT Ebeam|TPT E-beam]]. | ||
Find more information | |||
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!Ellipsometer | !Ellipsometer VASE | ||
|for getting access to the [[Specific Process Knowledge/Characterization/Optical characterization#Ellipsometer VASE and Ellipsometer M-2000V|Ellipsometers]] | |for getting access to the [[Specific Process Knowledge/Characterization/Optical characterization#Ellipsometer VASE and Ellipsometer M-2000V|Ellipsometers]] | ||
|This online course consists of two short online tutorials | |This online course consists of two short online tutorials | ||
* [https://www.jawoollam.com/resources/ellipsometry-tutorial/what-is-ellipsometry Tutorial | * [https://www.jawoollam.com/resources/ellipsometry-tutorial/what-is-ellipsometry Tutorial ''by Woollam''] | ||
* [https://www.youtube.com/watch?v=EC-oyRhKr0A|Ellipsometer | * [https://www.youtube.com/watch?v=EC-oyRhKr0A|Ellipsometer Ellipsometer operation ''by DTU Nanolab''] | ||
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! | ! Atomic Force Microscopy | ||
| for getting access to the [[Specific Process Knowledge/Characterization/AFM:_Atomic_Force_Microscopy]] | | for getting access to the [[Specific Process Knowledge/Characterization/AFM:_Atomic_Force_Microscopy | AFM equipment]] | ||
|This online course consists of | |This online course consists of three short training videos regarding equipment operation. | ||
[https://www.youtube.com/watch?v=i6JXopjBiy4&list=PLjWVU97LayHC9xeoG2uv8IaHuY7t-q0Tj AFM Icon-PT | * [https://www.youtube.com/watch?v=i6JXopjBiy4&list=PLjWVU97LayHC9xeoG2uv8IaHuY7t-q0Tj AFM Icon-PT Operation] | ||
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! Temescal E-beam evaporator | |||
| for getting access to the E-beam Evaporators [[Specific Process Knowledge/Thin film deposition/Temescal | (Temescal)]] or [[Specific Process Knowledge/Thin film deposition/10-pocket e-beam evaporator | (10-Pockets)]] | |||
|This online course consists of four short training videos regarding equipment operation. | |||
* [https://www.youtube.com/playlist?list=PLjWVU97LayHCQWuQyHwddJnpsEYfQp0wf Temescal Operation] | |||
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! Lesker Dual Chamber Sputter System | |||
| for getting access to the [[Specific Process Knowledge/Thin film deposition/Cluster-based multi-chamber high vacuum sputtering deposition system | Sputter-System Metal-Oxide(PC1) Metal-Nitride (PC3)]] | |||
|This online course consists of three short training videos regarding equipment operation for PC1 (Oxide) and PC3 (Nitride)). | |||
* [https://www.youtube.com/watch?v=1WHv36coRUc PC1 (Oxide) and PC3 (Nitride) Operation] | |||
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! XPS | |||
| for getting access to the [[Specific Process Knowledge/Characterization/XPS | XPS]] | |||
|If you already a user at DTU Nanolab and have access to LabManager, please fill the access request form following the link below: | |||
*[http://labmanager.dtu.dk/function.php?module=Request&view=edit&rt=2 Access request form for XPS training] | |||
Else, please contact the Fabrication Support group. | |||
This online course presents the theory behind XPS analysis, as well as training in equipment operation in the cleanroom. | |||
* "Theory behind XPS" by ''Technical University of Munich'' (pages 1-16): [[File:Electron Spectroscopy of surfaces.pdf]] | |||
* Youtube video by ''Kent L. Rhodes (McCrone Group)'' hosted by ''Hooke College of Applied Sciences'': [https://www.youtube.com/watch?v=nGQxmOcs2rg "Using XPS for Industrial Problem Solving"] | |||
* Equipment operation by DTU Nanolab: | |||
: [https://www.youtube.com/playlist?list=PLjWVU97LayHBtOkPCSv8QA-sD4Dbz1jrb XPS Operation] | |||
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