Specific Process Knowledge/Etch/ICP Metal Etcher/Barc Etch: Difference between revisions
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==Barc Etch== | ==Barc Etch== | ||
Etching barc with a | Etching barc with a CF4 recipe for barc etching is a good idea if you are on the limit of having enough DUV resist mask to reach etch depth you need. Here is an example of a barc etch I have started testing. I have also tried with and O2 descum process for comparison. | ||
{| border="1" cellspacing="1" cellpadding="2" align="left" | {| border="1" cellspacing="1" cellpadding="2" align="left" | ||
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! Barc etch with O2 | ! Barc etch with O2 | ||
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|Coil power||800W|| | |Coil power||800W||120w | ||
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|Platen power||100W||15W | |Platen power||100W||15W | ||
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|Flow rate H2||20sccm|| | |Flow rate H2||20sccm|| | ||
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|Flow rate O2|||| | |Flow rate O2||||10sccm | ||
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|T||0 degrees||0 degrees | |||
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|} | |} | ||