Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/Black silicon on Demand: Difference between revisions
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''This work was done by Vy Thi Hoang Nguyen @Nanolab in her ph.d. project ending 2020.'' | |||
Black silicon (BSi or silicon micro/nano-grass) is a frequently encountered phenomenon in highly directional etching of silicon using mainstream plasma etch tools. Because of the almost perfect light absorption, BSi has found a prominent place in photovoltaic applications. The strongly increased surface area has also shown attractive opportunities in chemical and optical devices. In addition, another already established characteristic of BSi is its ability to prevent cell growth and as such creates anti-bacterial, anti-fogging and self-cleaning surfaces. | Black silicon (BSi or silicon micro/nano-grass) is a frequently encountered phenomenon in highly directional etching of silicon using mainstream plasma etch tools. Because of the almost perfect light absorption, BSi has found a prominent place in photovoltaic applications. The strongly increased surface area has also shown attractive opportunities in chemical and optical devices. In addition, another already established characteristic of BSi is its ability to prevent cell growth and as such creates anti-bacterial, anti-fogging and self-cleaning surfaces. | ||
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Silicon wafers are prepared with 1.5 μm thick resist patterns (AZ MIR 701 DUV resist from MicroChemicals) and exposed using a maskless aligner (MLA150, Heidelberg) to create patterns above 400 nm. Below are some SEM images of BSi nanostructures achieved by the modified CORE process: | Silicon wafers are prepared with 1.5 μm thick resist patterns (AZ MIR 701 DUV resist from MicroChemicals) and exposed using a maskless aligner (MLA150, Heidelberg) to create patterns above 400 nm. Below are some SEM images of BSi nanostructures achieved by the modified CORE process: | ||
<gallery caption="" widths="360px" heights=" | <gallery caption="" widths="360px" heights="280px" perrow="2"> | ||
File:BSi free.png|''''' 1 µm silicon pillars etched with a BSi-free recipe''''' | File:BSi free.png|''''' 1 µm silicon pillars etched with a BSi-free recipe''''' | ||
File:BSi full.png|''''' 1 µm silicon pillars etched first with a BSi-free recipe and then continued with a BSi-full recipe''''' | File:BSi full.png|''''' 1 µm silicon pillars etched first with a BSi-free recipe and then continued with a BSi-full recipe''''' | ||
</gallery> | </gallery> | ||