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Specific Process Knowledge/Lithography/EBeamLithography/JEOLRequest: Difference between revisions

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The request form [[:File:JEOL9500 request form.docx |can be found here.]] Please send the request to [mailto:e-beam@nanolab.dtu.dk E-beam@nanolab.dtu.dk].  
The request form [[:File:JEOL9500 request form.docx |can be found here.]] Please send the request to [mailto:e-beam@nanolab.dtu.dk E-beam@nanolab.dtu.dk].  
<div class="left" style="color:red; width:auto; margin-left:auto; margin-right:auto;">'''Next day jobs must be submitted before 15.00.'''</div>
 
 
<div class="left" style="color:red; width:auto; margin-left:auto; margin-right:auto;">'''Job requests are only handled during business hours. In order for us to verify the job and plan ahead, next day jobs must be submitted before 13.00.'''</div>




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'''Date:''' Date of the request.
'''Date:''' Date of the request [YYMMDD].


'''Username:''' Labmanager username.
'''Username:''' Labmanager username.


'''Date and time:''' Find vacant slots in the booking calendar and fill in up to four dates and times that will work for you.
'''Date and time:''' Suggest one or two vacant slots in the booking calendar. Make sure you can actually have the substrate ready on time.


'''Cassette and window:''' Select the slot window(s) you would like to use.  
'''Cassette and window:''' Select the slot window(s) you would like to use.  


'''Job files:''' Job files must either be placed on:
'''Job files:''' Job files must either be placed on:
*The Cleanroom drive at "O:\CleanroomDrive\JEOL9500Jobs", please create a subfolder as [ddmmyy-initials] with the date being the same as put on the request form
*The Cleanroom drive at "O:\CleanroomDrive\JEOL9500Jobs", please create a subfolder as [YYMMDD-initials] with the date being the same as put on the request form
*The JEOL 9500 system at /home/eb0/jeoleb/job/1preex/username
*The JEOL 9500 system at /home/eb0/jeoleb/job/1preex/username
*The [[Specific Process Knowledge/Lithography/EBeamLithography/JEOL Compilation Computer|JEOL Compilation Computer]] at /home/eb0/jeoleb/job/1PreExposureFiles
*The [[Specific Process Knowledge/Lithography/EBeamLithography/JEOL Compilation Computer|JEOL Compilation Computer]] at /home/eb0/jeoleb/job/1PreExposureFiles
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'''Prealignment:''' Please indicate if you need prealignment.
'''Prealignment:''' Please indicate if you need prealignment.


'''Estimated execution time:''' State the expected execution time. Either from job compilation or based on the [[Specific_Process_Knowledge/Lithography/EBeamLithography#Exposure_time|expected exposure time]].
'''Estimated execution time:''' Expected execution time. Either from job compilation or based on the [[:File:Writing Time Estimator.xlsx|Writing Time Estimator Excel sheet]].


==Usage conditions==
==Usage conditions==
Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Lithography/EBeamLithography/JEOLRequest"