Specific Process Knowledge/Imprinting: Difference between revisions
| (6 intermediate revisions by the same user not shown) | |||
| Line 5: | Line 5: | ||
__TOC__ | __TOC__ | ||
= | = Nano Imprint Lithography = | ||
Nano Imprint Lithography, similar to Hot Embossing, is a parallel transfer of a pattern made by a serial technique (often e-beam). First a stamp is made, usually in Si or SiO<math>\rm{_2}</math> however other materials could also be used. The pattern on the stamp is then transferred to a polymer (on a different substrate), by heating both stamp and substrate to above the glass transition temperature T<math>_g</math> of the polymer and then pressing the stamp and the substrate together, hence deforming the polymer on the substrate. The stamp and substrate are then cooled down and only separated when the temperature is well below T<math>_g</math> of the polymer. Normally the stack is often cooled to room temperature to easily separate the two parts. | Nano Imprint Lithography, similar to Hot Embossing, is a parallel transfer of a pattern made by a serial technique (often e-beam). First a stamp is made, usually in Si or SiO<math>\rm{_2}</math> however other materials could also be used. The pattern on the stamp is then transferred to a polymer (on a different substrate), by heating both stamp and substrate to above the glass transition temperature T<math>_g</math> of the polymer and then pressing the stamp and the substrate together, hence deforming the polymer on the substrate. The stamp and substrate are then cooled down and only separated when the temperature is well below T<math>_g</math> of the polymer. Normally the stack is often cooled to room temperature to easily separate the two parts. | ||
| Line 15: | Line 15: | ||
It is necessary to deposit anti stiction coating on the stamp to ensure that it can be separated from the substrate, this is done in either the MVD or the ASE. If the stamp it not anti stiction coated it is likely that either (or both) the stamp and substrate will break during separation. It is only necessary to deposit anti stiction coating on the stamp one time even though it is used a multiple of times. | It is necessary to deposit anti stiction coating on the stamp to ensure that it can be separated from the substrate, this is done in either the MVD or the ASE. If the stamp it not anti stiction coated it is likely that either (or both) the stamp and substrate will break during separation. It is only necessary to deposit anti stiction coating on the stamp one time even though it is used a multiple of times. | ||
= Stamp for imprint = | == Stamp for imprint == | ||
A stamp for imprint lithography is usually made in Si or SiO, however other materials could also be used. | A stamp for imprint lithography is usually made in Si or SiO, however other materials could also be used. | ||
Here is a process flow for stamp made of SU8 resist.[[ | Here is a process flow for stamp made of SU8 resist.[[Media:Stamp Fabrication.docx| Stamp fabrication flow.]] | ||
<!-- | |||
= Imprint resist = | = Imprint resist = | ||
{{:Specific Process Knowledge/Lithography/Resist/NILresist | {{:Specific Process Knowledge/Lithography/Resist/NILresist | ||
!--> | |||
==Imprinting | ==Imprinting Parameters== | ||
When you do an imprint you may consider 3 most important parameters: pressure, temperature and imprinting time. All those parameters are depending of printable resists molecular weight and its glas transition temperature. | When you do an imprint you may consider 3 most important parameters: pressure, temperature and imprinting time. All those parameters are depending of printable resists molecular weight and its glas transition temperature. | ||
== Choose an | == Choose an Equipment == | ||
*[[Specific Process Knowledge/Thin_film_deposition/MVD|MVD]] - | *[[Specific_Process_Knowledge/Lithography/NanoImprintLithography#EVG_NIL|Imprinter 01]] - ''Tool to Imprint'' | ||
*[[Specific Process Knowledge/Thin_film_deposition/MVD|MVD]] - Molecular Vapor Deposition - ''Tool to deposit an antistiction coating for silicon or metal stamps'' | |||
*[[Specific Process Knowledge/Characterization/Drop Shape Analyzer|Drop Shape Analyzer]] - ''Tool to measure the hydrophobicity of the antistiction layer'' | *[[Specific Process Knowledge/Characterization/Drop Shape Analyzer|Drop Shape Analyzer]] - ''Tool to measure the hydrophobicity of the antistiction layer'' | ||