Specific Process Knowledge/Thermal Process/Furnace Noble: Difference between revisions
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{{cc-nanolab}} | |||
'''Feedback to this page''': '''[mailto:thinfilm@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thermal_Process/Furnace_Noble click here]''' | '''Feedback to this page''': '''[mailto:thinfilm@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thermal_Process/Furnace_Noble click here]''' | ||
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[[Category: Thermal process|Noble]] | [[Category: Thermal process|Noble]] | ||
[[Category: Furnaces|Noble]] | [[Category: Furnaces|Noble]] | ||
'''<p style="color:red;"> The Noble furnace has been decomissioned in January 2020.</span>''' | |||
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Please check the cross contamination information in LabManager before you use the furnace. | Please check the cross contamination information in LabManager before you use the furnace. | ||
[[Image:Noble.JPG|thumb|300x300px|Noble furnace. Positioned in service area Cx1]] | [[Image:Noble.JPG|thumb|300x300px|Noble furnace. Positioned in service area Cx1/ Photo: DTU Nanolab internal]] | ||
'''The user manual, technical information and contact information can be found in LabManager:''' | '''The user manual, technical information and contact information can be found in LabManager:''' | ||
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Oxidation: | Oxidation: | ||
*Dry | *Dry | ||
*Wet (with bubbler. | *Wet (with bubbler. Water steam + N<sub>2</sub>) | ||
Annealing: | Annealing: | ||
*N<sub>2</sub> | *N<sub>2</sub> | ||
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| style="background:LightGrey; color:black"|Substrate material allowed | | style="background:LightGrey; color:black"|Substrate material allowed | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*Silicon samples | *Silicon samples | ||
*Silicon samples with metals | *Silicon samples with metals | ||
*Silicon sample with polymers (only approved materials) | *Silicon sample with polymers (only approved materials) | ||
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