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=== Where have these numbers been used? ===
=== Where have these numbers been used? ===


* [http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Etch/DRIE-Pegasus/processA#Results:_Etched_depths_in_trenches_of_different_widths| Investigation of Process A performance on Pegasus 1]
* [[Specific_Process_Knowledge/Etch/DRIE-Pegasus/processA]]
 
 
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