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'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/Overview_of_chemicals click here]'''
{{cc-nanolab}}


'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/Overview_of_chemicals click here]'''
<br>
<br>
=<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>[[image:Under_construction.png|200px]]=
=<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>[[image:Under_construction.png|200px]]=
On this page, an overview over the standard chemicals we have in the Cleanroom, as well as a link to kemibrug.dk for those chemicals. You will also be able to see if there is any change in the chemicals we have or something else about them in the comments.
''All links to kemibrug.dk require a DTU login.''


{| border="2" cellspacing="0" cellpadding="10"  
{| border="2" cellspacing="0" cellpadding="10"  
Line 37: Line 43:
!style="background:silver; color:black;" align="left"|AR-600-546 Developer
!style="background:silver; color:black;" align="left"|AR-600-546 Developer
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhERkZLSEtGS1RkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.]
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhERkZLSEtGS1RkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.]
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specified
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specified
!style="background:WhiteSmoke; color:black"|Comment
!style="background:WhiteSmoke; color:black"|Comment
|-
|-
Line 78: Line 84:
|-
|-
!style="background:silver; color:black;" align="left"|AZ 726MIF developer (Tromle)
!style="background:silver; color:black;" align="left"|AZ 726MIF developer (Tromle)
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhERkVGTU5NSFRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.]
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETkVFTUVGR1RkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.]
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
Line 84: Line 90:
|-
|-
!style="background:silver; color:black;" align="left"|AZ MiR 701 (29CPS) Photoresist
!style="background:silver; color:black;" align="left"|AZ MiR 701 (29CPS) Photoresist
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETEtGS0ZNSVRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. No nr.]
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhERkVGTU5NSFRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. No nr.]
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific  
!style="background:LightGrey; color:black;"|not specific  
Line 102: Line 108:
|-
|-
!style="background:silver; color:black;" align="left"|Chrome etch 18
!style="background:silver; color:black;" align="left"|Chrome etch 18
!style="background:LightGrey; color:black;"|Cas Nr.  
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhES0hHR0pMS1RkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.]
no nr.  
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific  
!style="background:LightGrey; color:black;"|not specific  
Line 109: Line 114:
|-
|-
!style="background:silver; color:black;" align="left"|Developer MIBK Methylisobutylketon 4L
!style="background:silver; color:black;" align="left"|Developer MIBK Methylisobutylketon 4L
!style="background:LightGrey; color:black;"|Cas Nr.  
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETE5FSkVMS1RkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 108-10-1]
108-10-1
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|VLSI
!style="background:LightGrey; color:black;"|VLSI
Line 116: Line 120:
|-
|-
!style="background:silver; color:black;" align="left"|DUV42S-6,4 L ultra nowpak W/Closure lid
!style="background:silver; color:black;" align="left"|DUV42S-6,4 L ultra nowpak W/Closure lid
!style="background:LightGrey; color:black;"|Cas Nr.  
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhERkdNR0tITVRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.]
no nr.  
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|Aicello
!style="background:LightGrey; color:black;"|Aicello
Line 123: Line 126:
|-
|-
!style="background:silver; color:black;" align="left"|Ethanol
!style="background:silver; color:black;" align="left"|Ethanol
!style="background:LightGrey; color:black;"|Cas Nr.  
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETUpFRklGS1RkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 64-17-5]
64-17-5  
!style="background:LightGrey; color:black;"|99,9%-100%
!style="background:LightGrey; color:black;"|99,9%-100%
!style="background:LightGrey; color:black;"|VLSI  
!style="background:LightGrey; color:black;"|VLSI  
Line 130: Line 132:
|-
|-
!style="background:silver; color:black;" align="left"|Hydrofluoric acid buffer (BHF/BOE)
!style="background:silver; color:black;" align="left"|Hydrofluoric acid buffer (BHF/BOE)
!style="background:LightGrey; color:black;"|Cas Nr.  
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETUdJSUpNS1RkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.]
no nr.
!style="background:LightGrey; color:black;"|12,5%
!style="background:LightGrey; color:black;"|12,5%
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
Line 137: Line 138:
|-
|-
!style="background:silver; color:black;" align="left"|Hydrofluoric acid buffer (BHF/BOE W/wetting agent)
!style="background:silver; color:black;" align="left"|Hydrofluoric acid buffer (BHF/BOE W/wetting agent)
!style="background:LightGrey; color:black;"|Cas Nr.  
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETUZKS01LSlRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.]
no nr.
!style="background:LightGrey; color:black;"|12,5%
!style="background:LightGrey; color:black;"|12,5%
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
Line 144: Line 144:
|-
|-
!style="background:silver; color:black;" align="left"|Hexamethyldisilasan
!style="background:silver; color:black;" align="left"|Hexamethyldisilasan
!style="background:LightGrey; color:black;"|Cas Nr.  
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhER0VFRkxJVGQlYzIlODclN2N2JWMyJTgzJTdlJWMyJTg4diVjMiU4OSU3ZSVjMiU4NCVjMiU4MyVjMiU4OCU1ZVlSSQ==#K Cas Nr. 999-97-3]
999-97-3
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
Line 151: Line 150:
|-
|-
!style="background:silver; color:black" align="left" valign="top" rowspan="4"|HYDROFLUORIC ACID (HF)
!style="background:silver; color:black" align="left" valign="top" rowspan="4"|HYDROFLUORIC ACID (HF)
!style="background:LightGrey; color:black;"|Cas Nr.  
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETUhLSkpITVRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.]
no nr.
|style="background:LightGrey; color:black"|1%
|style="background:LightGrey; color:black"|1%
!style="background:LightGrey; color:black;"|VLSI
!style="background:LightGrey; color:black;"|VLSI
|style="background:WhiteSmoke; color:black"|Comment
|style="background:WhiteSmoke; color:black"|Comment
|-
|-
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETUhLSkhLTlRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. No nr.]
no nr.
|style="background:LightGrey; color:black"|10%
|style="background:LightGrey; color:black"|10%
!style="background:LightGrey; color:black;"|VLSI
!style="background:LightGrey; color:black;"|VLSI
|style="background:WhiteSmoke; color:black"|Comment
|style="background:WhiteSmoke; color:black"|Will be removed ones we no longer have any in storage
|-  
|-  
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETUhLSktOTFRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.]
no nr.
|style="background:LightGrey; color:black"|40%
|style="background:LightGrey; color:black"|40%
!style="background:LightGrey; color:black;"|EMSURE® ISO for analysis
!style="background:LightGrey; color:black;"|EMSURE® ISO for analysis
|style="background:WhiteSmoke; color:black"|Comment
|style="background:WhiteSmoke; color:black"|Comment
|-
|-
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhES0pJTEtJR1RkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.]
no nr.
|style="background:LightGrey; color:black"|50%
|style="background:LightGrey; color:black"|50%
!style="background:LightGrey; color:black;"|VLSI
!style="background:LightGrey; color:black;"|VLSI
Line 176: Line 171:
|-
|-
!style="background:silver; color:black;" align="left"|Hydrochloric acid
!style="background:silver; color:black;" align="left"|Hydrochloric acid
!style="background:LightGrey; color:black;"|Cas Nr. 7647-01-0
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETElITUpITlRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 7647-01-0]
!style="background:LightGrey; color:black;"|37%
!style="background:LightGrey; color:black;"|37%
!style="background:LightGrey; color:black;"|VLSI
!style="background:LightGrey; color:black;"|VLSI
Line 182: Line 177:
|-
|-
!style="background:silver; color:black;" align="left"|Hydrogenperoxid
!style="background:silver; color:black;" align="left"|Hydrogenperoxid
!style="background:LightGrey; color:black;"|Cas Nr. 7722-84-1
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhESUlKRUVISVRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 7722-84-1]
!style="background:LightGrey; color:black;"|31%
!style="background:LightGrey; color:black;"|31%
!style="background:LightGrey; color:black;"|VLSI
!style="background:LightGrey; color:black;"|VLSI
Line 188: Line 183:
|-
|-
!style="background:silver; color:black;" align="left"|KRF m230Y 6cP Gal
!style="background:silver; color:black;" align="left"|KRF m230Y 6cP Gal
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhESkpGSk1GSVRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.]
no nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
Line 195: Line 189:
|-
|-
!style="background:silver; color:black;" align="left"|KRF M35G 27cP Gal
!style="background:silver; color:black;" align="left"|KRF M35G 27cP Gal
!style="background:LightGrey; color:black;"|Cas Nr.  
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhESkpGSklKRlRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.]
no nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
Line 202: Line 195:
|-
|-
!style="background:silver; color:black;" align="left"|Microposit Remover 1165  
!style="background:silver; color:black;" align="left"|Microposit Remover 1165  
!style="background:LightGrey; color:black;"|Cas Nr.  
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhES0VOSUpFVGQlYzIlODclN2N2JWMyJTgzJTdlJWMyJTg4diVjMiU4OSU3ZSVjMiU4NCVjMiU4MyVjMiU4OCU1ZVlSSQ==#K Cas Nr. no nr.]
no nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|Grade
!style="background:LightGrey; color:black;"|Grade
Line 209: Line 201:
|-
|-
!style="background:silver; color:black;" align="left"|Nitric acid  
!style="background:silver; color:black;" align="left"|Nitric acid  
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETEpITkVGTFRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 231-714-2]
231-714-2
!style="background:LightGrey; color:black;"|69%
!style="background:LightGrey; color:black;"|69%
!style="background:LightGrey; color:black;"|VLSI
!style="background:LightGrey; color:black;"|VLSI
Line 216: Line 207:
|-
|-
!style="background:silver; color:black;" align="left"|Ortho-Phosphoric acid
!style="background:silver; color:black;" align="left"|Ortho-Phosphoric acid
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETElMTEdOS1RkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 7664-38-2]
7664-38-2
!style="background:LightGrey; color:black;"|85%
!style="background:LightGrey; color:black;"|85%
!style="background:LightGrey; color:black;"|VLSI
!style="background:LightGrey; color:black;"|VLSI
Line 223: Line 213:
|-
|-
!style="background:silver; color:black;" align="left"|Potassium hydroxide solution
!style="background:silver; color:black;" align="left"|Potassium hydroxide solution
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETE1IS0xIRVRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 1310-58-3]
1310-58-3
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|Selectipur
!style="background:LightGrey; color:black;"|Selectipur
!style="background:WhiteSmoke; color:black"|Comment
!style="background:WhiteSmoke; color:black"|Comment
|-
|-
!style="background:silver; color:black;" align="left"|Propanol
!style="background:silver; color:black;" align="left"|Isoropanol
!style="background:LightGrey; color:black;"|Cas Nr.  
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETEhITUlHRlRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 67-63-0]
67-63-0
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|VLSi
!style="background:LightGrey; color:black;"|VLSi
Line 237: Line 225:
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|-
!style="background:silver; color:black;" align="left"|SU-8 2005
!style="background:silver; color:black;" align="left"|SU-8 2005
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhES0lFRUVJVGQlYzIlODclN2N2JWMyJTgzJTdlJWMyJTg4diVjMiU4OSU3ZSVjMiU4NCVjMiU4MyVjMiU4OCU1ZVlSSQ==#K Cas Nr. no .nr]
no .nr
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
Line 244: Line 231:
|-
|-
!style="background:silver; color:black;" align="left"|SU-8 2035
!style="background:silver; color:black;" align="left"|SU-8 2035
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhES0lFRUVJVGQlYzIlODclN2N2JWMyJTgzJTdlJWMyJTg4diVjMiU4OSU3ZSVjMiU4NCVjMiU4MyVjMiU4OCU1ZVlSSQ==#K Cas Nr. no .nr]
no nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
Line 251: Line 237:
|-
|-
!style="background:silver; color:black;" align="left"|SU-8 2075
!style="background:silver; color:black;" align="left"|SU-8 2075
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhES0lFRUVJVGQlYzIlODclN2N2JWMyJTgzJTdlJWMyJTg4diVjMiU4OSU3ZSVjMiU4NCVjMiU4MyVjMiU4OCU1ZVlSSQ==#K Cas Nr. no .nr]
no nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
Line 258: Line 243:
|-
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!style="background:silver; color:black;" align="left"|SU-8 Developer (Mr-dev 600)
!style="background:silver; color:black;" align="left"|SU-8 Developer (Mr-dev 600)
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETkdITklFVGQlYzIlODclN2N2JWMyJTgzJTdlJWMyJTg4diVjMiU4OSU3ZSVjMiU4NCVjMiU4MyVjMiU4OCU1ZVlSSQ==#K Cas Nr. no nr.]
no nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
Line 265: Line 249:
|-
|-
!style="background:silver; color:black;" align="left"|SU-8 Thinner
!style="background:silver; color:black;" align="left"|SU-8 Thinner
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhES0dLRktGVGQlYzIlODclN2N2JWMyJTgzJTdlJWMyJTg4diVjMiU4OSU3ZSVjMiU4NCVjMiU4MyVjMiU4OCU1ZVlSSQ==#K Cas Nr. no nr.]
no nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
Line 272: Line 255:
|-
|-
!style="background:silver; color:black;" align="left"|Sulfamic acid  
!style="background:silver; color:black;" align="left"|Sulfamic acid  
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhESklISUVLS1RkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 5329-14-6]
5329-14-6
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|Alkamlimetry
!style="background:LightGrey; color:black;"|Alkamlimetry
Line 279: Line 261:
|-
|-
!style="background:silver; color:black;" align="left"|Sulfuric acid  
!style="background:silver; color:black;" align="left"|Sulfuric acid  
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETElMTk1GTFRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 7664-93-9]
7664-93-9
!style="background:LightGrey; color:black;"|95%-97%
!style="background:LightGrey; color:black;"|95%-97%
!style="background:LightGrey; color:black;"|VLSI
!style="background:LightGrey; color:black;"|VLSI
Line 286: Line 267:
|-
|-
!style="background:silver; color:black;" align="left"|TI spray  
!style="background:silver; color:black;" align="left"|TI spray  
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETUlHSE1NTFRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.]
no nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
Line 293: Line 273:
|-
|-
!style="background:silver; color:black;" align="left"|ZED N50
!style="background:silver; color:black;" align="left"|ZED N50
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhESkpOTUlMVGQlYzIlODclN2N2JWMyJTgzJTdlJWMyJTg4diVjMiU4OSU3ZSVjMiU4NCVjMiU4MyVjMiU4OCU1ZVlSSQ==#K Cas Nr. no nr.]
no nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
Line 300: Line 279:
|-
|-
!style="background:silver; color:black;" align="left"|Triton x-100
!style="background:silver; color:black;" align="left"|Triton x-100
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETEdORUlJRlRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 9002-93-1]
9002-93-1
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Etch/Overview_of_chemicals"