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'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/Overview_of_chemicals click here]'''
{{cc-nanolab}}


'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/Overview_of_chemicals click here]'''
<br>
<br>
=<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>[[image:Under_construction.png|200px]]=
=<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>[[image:Under_construction.png|200px]]=
On this page, an overview over the standard chemicals we have in the Cleanroom, as well as a link to kemibrug.dk for those chemicals. You will also be able to see if there is any change in the chemicals we have or something else about them in the comments.
''All links to kemibrug.dk require a DTU login.''


{| border="2" cellspacing="0" cellpadding="10"  
{| border="2" cellspacing="0" cellpadding="10"  
Line 12: Line 18:
|-
|-
!style="background:silver; color:black;" align="left"|Acetone
!style="background:silver; color:black;" align="left"|Acetone
!style="background:LightGrey; color:black;"|Cas Nr.  
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETExFTkhFSlRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 67-64-1]
67-64-1
!style="background:LightGrey; color:black;"|99,8%-100%
!style="background:LightGrey; color:black;"|99,8%-100%
!style="background:LightGrey; color:black;"|VLSi
!style="background:LightGrey; color:black;"|VLSi
Line 19: Line 24:
|-
|-
!style="background:silver; color:black;" align="left"|Ammoniumhydroxyd
!style="background:silver; color:black;" align="left"|Ammoniumhydroxyd
!style="background:LightGrey; color:black;"|Cas Nr.  
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier?casnr=1336-21-6&pnr=&KBAOnly=false&SearchInNotes=false&NormalSearchKemikalier=true&NormalSearchKemikalier=false&WildCardSearchKemikalier=false&ExactSearchKemikalier=false&inklNoter=false&selectedLangtidsvirkning= Cas Nr. 1336-21-6]
1336-21-6  
!style="background:LightGrey; color:black;"|28%
!style="background:LightGrey; color:black;"|28%
!style="background:LightGrey; color:black;"|VLSI
!style="background:LightGrey; color:black;"|VLSI
Line 26: Line 30:
|-
|-
!style="background:silver; color:black;" align="left"|Ammoniumperoxodisulfat
!style="background:silver; color:black;" align="left"|Ammoniumperoxodisulfat
!style="background:LightGrey; color:black;"|Cas Nr.  
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhESUlKRUpFRVRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 7727-54-0]
7727-54-0
!style="background:LightGrey; color:black;"|98%-99,1%
!style="background:LightGrey; color:black;"|98%-99,1%
!style="background:LightGrey; color:black;"|Analyse
!style="background:LightGrey; color:black;"|Analyse
Line 33: Line 36:
|-
|-
!style="background:silver; color:black;" align="left"|Anisole Anhydrous
!style="background:silver; color:black;" align="left"|Anisole Anhydrous
!style="background:LightGrey; color:black;"|Cas Nr.  
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhESU1NTkVKVGQlYzIlODclN2N2JWMyJTgzJTdlJWMyJTg4diVjMiU4OSU3ZSVjMiU4NCVjMiU4MyVjMiU4OCU1ZVlSSQ==#K Cas Nr. 100-66-3]
100-66-3
!style="background:LightGrey; color:black;"|99,7%
!style="background:LightGrey; color:black;"|99,7%
!style="background:LightGrey; color:black;"|GPR
!style="background:LightGrey; color:black;"|GPR
Line 40: Line 42:
|-
|-
!style="background:silver; color:black;" align="left"|AR-600-546 Developer
!style="background:silver; color:black;" align="left"|AR-600-546 Developer
!style="background:LightGrey; color:black;"|Cas Nr.  
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhERkZLSEtGS1RkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.]
no nr.
!style="background:LightGrey; color:black;"|not specified
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specified
!style="background:LightGrey; color:black;"|not specific
!style="background:WhiteSmoke; color:black"|Comment
!style="background:WhiteSmoke; color:black"|Comment
|-
|-
!style="background:silver; color:black;" align="left"|AR-600-71 Remover
!style="background:silver; color:black;" align="left"|AR-600-71 Remover
!style="background:LightGrey; color:black;"|Cas Nr.  
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhERkZLRkxFRlRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.]
no nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific  
!style="background:LightGrey; color:black;"|not specific  
Line 54: Line 54:
|-
|-
!style="background:silver; color:black;" align="left"|AR-6200.09 E-beam resist
!style="background:silver; color:black;" align="left"|AR-6200.09 E-beam resist
!style="background:LightGrey; color:black;"|Cas Nr.  
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhERkZLR0xMSVRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.]
no nr.  
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific  
!style="background:LightGrey; color:black;"|not specific  
Line 61: Line 60:
|-
|-
!style="background:silver; color:black;" align="left"|AZ 351B Developer
!style="background:silver; color:black;" align="left"|AZ 351B Developer
!style="background:LightGrey; color:black;"|Cas Nr.  
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhES01NTUdMRVRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.]
no nr.  
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific  
!style="background:LightGrey; color:black;"|not specific  
Line 68: Line 66:
|-
|-
!style="background:silver; color:black;" align="left"|AZ 4562 Photoresist
!style="background:silver; color:black;" align="left"|AZ 4562 Photoresist
!style="background:LightGrey; color:black;"|Cas Nr.  
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETEtKSEVKSFRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.]
no nr.  
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
Line 75: Line 72:
|-
|-
!style="background:silver; color:black;" align="left"|AZ 5214E Photoresist
!style="background:silver; color:black;" align="left"|AZ 5214E Photoresist
!style="background:LightGrey; color:black;"|Cas Nr.  
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETEdKTEdJSFRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.]
no nr.  
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific  
!style="background:LightGrey; color:black;"|not specific  
Line 82: Line 78:
|-
|-
!style="background:silver; color:black;" align="left"|AZ 726MIF developer
!style="background:silver; color:black;" align="left"|AZ 726MIF developer
!style="background:LightGrey; color:black;"|Cas Nr.  
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETkVFTUVGR1RkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.]
no nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific  
!style="background:LightGrey; color:black;"|not specific  
Line 89: Line 84:
|-
|-
!style="background:silver; color:black;" align="left"|AZ 726MIF developer (Tromle)
!style="background:silver; color:black;" align="left"|AZ 726MIF developer (Tromle)
!style="background:LightGrey; color:black;"|Cas Nr.  
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETkVFTUVGR1RkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.]
no nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
Line 96: Line 90:
|-
|-
!style="background:silver; color:black;" align="left"|AZ MiR 701 (29CPS) Photoresist
!style="background:silver; color:black;" align="left"|AZ MiR 701 (29CPS) Photoresist
!style="background:LightGrey; color:black;"|Cas Nr.  
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhERkVGTU5NSFRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. No nr.]
no nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific  
!style="background:LightGrey; color:black;"|not specific  
Line 103: Line 96:
|-
|-
!style="background:silver; color:black;" align="left"|AZ nLOF 2020 Photoresist
!style="background:silver; color:black;" align="left"|AZ nLOF 2020 Photoresist
!style="background:LightGrey; color:black;"|Cas Nr.  
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETEtGS0ZNSVRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.]
no nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific  
!style="background:LightGrey; color:black;"|not specific  
Line 110: Line 102:
|-
|-
!style="background:silver; color:black;" align="left"|Boric Acid powder
!style="background:silver; color:black;" align="left"|Boric Acid powder
!style="background:LightGrey; color:black;"|Cas Nr.  
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETUZGS0pJR1RkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 10043-35-3]
10043-35-3
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|Analytic
!style="background:LightGrey; color:black;"|Analytic
Line 117: Line 108:
|-
|-
!style="background:silver; color:black;" align="left"|Chrome etch 18
!style="background:silver; color:black;" align="left"|Chrome etch 18
!style="background:LightGrey; color:black;"|Cas Nr.  
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhES0hHR0pMS1RkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.]
no nr.  
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific  
!style="background:LightGrey; color:black;"|not specific  
Line 124: Line 114:
|-
|-
!style="background:silver; color:black;" align="left"|Developer MIBK Methylisobutylketon 4L
!style="background:silver; color:black;" align="left"|Developer MIBK Methylisobutylketon 4L
!style="background:LightGrey; color:black;"|Cas Nr.  
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETE5FSkVMS1RkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 108-10-1]
108-10-1
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|VLSI
!style="background:LightGrey; color:black;"|VLSI
Line 131: Line 120:
|-
|-
!style="background:silver; color:black;" align="left"|DUV42S-6,4 L ultra nowpak W/Closure lid
!style="background:silver; color:black;" align="left"|DUV42S-6,4 L ultra nowpak W/Closure lid
!style="background:LightGrey; color:black;"|Cas Nr.  
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhERkdNR0tITVRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.]
no nr.  
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|Aicello
!style="background:LightGrey; color:black;"|Aicello
Line 138: Line 126:
|-
|-
!style="background:silver; color:black;" align="left"|Ethanol
!style="background:silver; color:black;" align="left"|Ethanol
!style="background:LightGrey; color:black;"|Cas Nr.  
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETUpFRklGS1RkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 64-17-5]
64-17-5  
!style="background:LightGrey; color:black;"|99,9%-100%
!style="background:LightGrey; color:black;"|99,9%-100%
!style="background:LightGrey; color:black;"|VLSI  
!style="background:LightGrey; color:black;"|VLSI  
Line 145: Line 132:
|-
|-
!style="background:silver; color:black;" align="left"|Hydrofluoric acid buffer (BHF/BOE)
!style="background:silver; color:black;" align="left"|Hydrofluoric acid buffer (BHF/BOE)
!style="background:LightGrey; color:black;"|Cas Nr.  
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETUdJSUpNS1RkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.]
no nr.
!style="background:LightGrey; color:black;"|12,5%
!style="background:LightGrey; color:black;"|12,5%
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
Line 152: Line 138:
|-
|-
!style="background:silver; color:black;" align="left"|Hydrofluoric acid buffer (BHF/BOE W/wetting agent)
!style="background:silver; color:black;" align="left"|Hydrofluoric acid buffer (BHF/BOE W/wetting agent)
!style="background:LightGrey; color:black;"|Cas Nr.  
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETUZKS01LSlRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.]
no nr.
!style="background:LightGrey; color:black;"|12,5%
!style="background:LightGrey; color:black;"|12,5%
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
Line 159: Line 144:
|-
|-
!style="background:silver; color:black;" align="left"|Hexamethyldisilasan
!style="background:silver; color:black;" align="left"|Hexamethyldisilasan
!style="background:LightGrey; color:black;"|Cas Nr.  
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhER0VFRkxJVGQlYzIlODclN2N2JWMyJTgzJTdlJWMyJTg4diVjMiU4OSU3ZSVjMiU4NCVjMiU4MyVjMiU4OCU1ZVlSSQ==#K Cas Nr. 999-97-3]
999-97-3
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
Line 166: Line 150:
|-
|-
!style="background:silver; color:black" align="left" valign="top" rowspan="4"|HYDROFLUORIC ACID (HF)
!style="background:silver; color:black" align="left" valign="top" rowspan="4"|HYDROFLUORIC ACID (HF)
!style="background:LightGrey; color:black;"|Cas Nr.  
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETUhLSkpITVRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.]
no nr.
|style="background:LightGrey; color:black"|1%
|style="background:LightGrey; color:black"|1%
!style="background:LightGrey; color:black;"|VLSI
!style="background:LightGrey; color:black;"|VLSI
|style="background:WhiteSmoke; color:black"|Comment
|style="background:WhiteSmoke; color:black"|Comment
|-
|-
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETUhLSkhLTlRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. No nr.]
no nr.
|style="background:LightGrey; color:black"|10%
|style="background:LightGrey; color:black"|10%
!style="background:LightGrey; color:black;"|VLSI
!style="background:LightGrey; color:black;"|VLSI
|style="background:WhiteSmoke; color:black"|Comment
|style="background:WhiteSmoke; color:black"|Will be removed ones we no longer have any in storage
|-  
|-  
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETUhLSktOTFRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.]
no nr.
|style="background:LightGrey; color:black"|40%
|style="background:LightGrey; color:black"|40%
!style="background:LightGrey; color:black;"|EMSURE® ISO for analysis
!style="background:LightGrey; color:black;"|EMSURE® ISO for analysis
|style="background:WhiteSmoke; color:black"|Comment
|style="background:WhiteSmoke; color:black"|Comment
|-
|-
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhES0pJTEtJR1RkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.]
no nr.
|style="background:LightGrey; color:black"|50%
|style="background:LightGrey; color:black"|50%
!style="background:LightGrey; color:black;"|VLSI
!style="background:LightGrey; color:black;"|VLSI
Line 191: Line 171:
|-
|-
!style="background:silver; color:black;" align="left"|Hydrochloric acid
!style="background:silver; color:black;" align="left"|Hydrochloric acid
!style="background:LightGrey; color:black;"|Cas Nr. 7647-01-0
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETElITUpITlRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 7647-01-0]
!style="background:LightGrey; color:black;"|37%
!style="background:LightGrey; color:black;"|37%
!style="background:LightGrey; color:black;"|VLSI
!style="background:LightGrey; color:black;"|VLSI
Line 197: Line 177:
|-
|-
!style="background:silver; color:black;" align="left"|Hydrogenperoxid
!style="background:silver; color:black;" align="left"|Hydrogenperoxid
!style="background:LightGrey; color:black;"|Cas Nr. 7722-84-1
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhESUlKRUVISVRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 7722-84-1]
!style="background:LightGrey; color:black;"|31%
!style="background:LightGrey; color:black;"|31%
!style="background:LightGrey; color:black;"|VLSI
!style="background:LightGrey; color:black;"|VLSI
Line 203: Line 183:
|-
|-
!style="background:silver; color:black;" align="left"|KRF m230Y 6cP Gal
!style="background:silver; color:black;" align="left"|KRF m230Y 6cP Gal
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhESkpGSk1GSVRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.]
no nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
Line 210: Line 189:
|-
|-
!style="background:silver; color:black;" align="left"|KRF M35G 27cP Gal
!style="background:silver; color:black;" align="left"|KRF M35G 27cP Gal
!style="background:LightGrey; color:black;"|Cas Nr.  
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhESkpGSklKRlRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.]
no nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
Line 217: Line 195:
|-
|-
!style="background:silver; color:black;" align="left"|Microposit Remover 1165  
!style="background:silver; color:black;" align="left"|Microposit Remover 1165  
!style="background:LightGrey; color:black;"|Cas Nr.  
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhES0VOSUpFVGQlYzIlODclN2N2JWMyJTgzJTdlJWMyJTg4diVjMiU4OSU3ZSVjMiU4NCVjMiU4MyVjMiU4OCU1ZVlSSQ==#K Cas Nr. no nr.]
no nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|Grade
!style="background:LightGrey; color:black;"|Grade
Line 224: Line 201:
|-
|-
!style="background:silver; color:black;" align="left"|Nitric acid  
!style="background:silver; color:black;" align="left"|Nitric acid  
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETEpITkVGTFRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 231-714-2]
231-714-2
!style="background:LightGrey; color:black;"|69%
!style="background:LightGrey; color:black;"|69%
!style="background:LightGrey; color:black;"|VLSI
!style="background:LightGrey; color:black;"|VLSI
Line 231: Line 207:
|-
|-
!style="background:silver; color:black;" align="left"|Ortho-Phosphoric acid
!style="background:silver; color:black;" align="left"|Ortho-Phosphoric acid
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETElMTEdOS1RkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 7664-38-2]
7664-38-2
!style="background:LightGrey; color:black;"|85%
!style="background:LightGrey; color:black;"|85%
!style="background:LightGrey; color:black;"|VLSI
!style="background:LightGrey; color:black;"|VLSI
Line 238: Line 213:
|-
|-
!style="background:silver; color:black;" align="left"|Potassium hydroxide solution
!style="background:silver; color:black;" align="left"|Potassium hydroxide solution
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETE1IS0xIRVRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 1310-58-3]
1310-58-3
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|Selectipur
!style="background:LightGrey; color:black;"|Selectipur
!style="background:WhiteSmoke; color:black"|Comment
!style="background:WhiteSmoke; color:black"|Comment
|-
|-
!style="background:silver; color:black;" align="left"|Propanol
!style="background:silver; color:black;" align="left"|Isoropanol
!style="background:LightGrey; color:black;"|Cas Nr.  
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETEhITUlHRlRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 67-63-0]
67-63-0
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|VLSi
!style="background:LightGrey; color:black;"|VLSi
Line 252: Line 225:
|-
|-
!style="background:silver; color:black;" align="left"|SU-8 2005
!style="background:silver; color:black;" align="left"|SU-8 2005
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhES0lFRUVJVGQlYzIlODclN2N2JWMyJTgzJTdlJWMyJTg4diVjMiU4OSU3ZSVjMiU4NCVjMiU4MyVjMiU4OCU1ZVlSSQ==#K Cas Nr. no .nr]
no .nr
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
Line 259: Line 231:
|-
|-
!style="background:silver; color:black;" align="left"|SU-8 2035
!style="background:silver; color:black;" align="left"|SU-8 2035
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhES0lFRUVJVGQlYzIlODclN2N2JWMyJTgzJTdlJWMyJTg4diVjMiU4OSU3ZSVjMiU4NCVjMiU4MyVjMiU4OCU1ZVlSSQ==#K Cas Nr. no .nr]
no nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
Line 266: Line 237:
|-
|-
!style="background:silver; color:black;" align="left"|SU-8 2075
!style="background:silver; color:black;" align="left"|SU-8 2075
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhES0lFRUVJVGQlYzIlODclN2N2JWMyJTgzJTdlJWMyJTg4diVjMiU4OSU3ZSVjMiU4NCVjMiU4MyVjMiU4OCU1ZVlSSQ==#K Cas Nr. no .nr]
no nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
Line 273: Line 243:
|-
|-
!style="background:silver; color:black;" align="left"|SU-8 Developer (Mr-dev 600)
!style="background:silver; color:black;" align="left"|SU-8 Developer (Mr-dev 600)
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETkdITklFVGQlYzIlODclN2N2JWMyJTgzJTdlJWMyJTg4diVjMiU4OSU3ZSVjMiU4NCVjMiU4MyVjMiU4OCU1ZVlSSQ==#K Cas Nr. no nr.]
no nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
Line 280: Line 249:
|-
|-
!style="background:silver; color:black;" align="left"|SU-8 Thinner
!style="background:silver; color:black;" align="left"|SU-8 Thinner
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhES0dLRktGVGQlYzIlODclN2N2JWMyJTgzJTdlJWMyJTg4diVjMiU4OSU3ZSVjMiU4NCVjMiU4MyVjMiU4OCU1ZVlSSQ==#K Cas Nr. no nr.]
no nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
Line 287: Line 255:
|-
|-
!style="background:silver; color:black;" align="left"|Sulfamic acid  
!style="background:silver; color:black;" align="left"|Sulfamic acid  
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhESklISUVLS1RkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 5329-14-6]
5329-14-6
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|Alkamlimetry
!style="background:LightGrey; color:black;"|Alkamlimetry
Line 294: Line 261:
|-
|-
!style="background:silver; color:black;" align="left"|Sulfuric acid  
!style="background:silver; color:black;" align="left"|Sulfuric acid  
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETElMTk1GTFRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 7664-93-9]
7664-93-9
!style="background:LightGrey; color:black;"|95%-97%
!style="background:LightGrey; color:black;"|95%-97%
!style="background:LightGrey; color:black;"|VLSI
!style="background:LightGrey; color:black;"|VLSI
Line 301: Line 267:
|-
|-
!style="background:silver; color:black;" align="left"|TI spray  
!style="background:silver; color:black;" align="left"|TI spray  
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETUlHSE1NTFRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.]
no nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
Line 308: Line 273:
|-
|-
!style="background:silver; color:black;" align="left"|ZED N50
!style="background:silver; color:black;" align="left"|ZED N50
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhESkpOTUlMVGQlYzIlODclN2N2JWMyJTgzJTdlJWMyJTg4diVjMiU4OSU3ZSVjMiU4NCVjMiU4MyVjMiU4OCU1ZVlSSQ==#K Cas Nr. no nr.]
no nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
Line 315: Line 279:
|-
|-
!style="background:silver; color:black;" align="left"|Triton x-100
!style="background:silver; color:black;" align="left"|Triton x-100
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETEdORUlJRlRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 9002-93-1]
9002-93-1
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific

Latest revision as of 16:06, 2 June 2025

The content on this page, including all images and pictures, was created by DTU Nanolab staff, unless otherwise stated.

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THIS PAGE IS UNDER CONSTRUCTION

On this page, an overview over the standard chemicals we have in the Cleanroom, as well as a link to kemibrug.dk for those chemicals. You will also be able to see if there is any change in the chemicals we have or something else about them in the comments.

All links to kemibrug.dk require a DTU login.

Chemical Cas Nr. Concentration Grade Comment
Acetone Cas Nr. 67-64-1 99,8%-100% VLSi
Ammoniumhydroxyd Cas Nr. 1336-21-6 28% VLSI Comment
Ammoniumperoxodisulfat Cas Nr. 7727-54-0 98%-99,1% Analyse Comment
Anisole Anhydrous Cas Nr. 100-66-3 99,7% GPR Comment
AR-600-546 Developer Cas Nr. no nr. not specified not specified Comment
AR-600-71 Remover Cas Nr. no nr. not specific not specific Comment
AR-6200.09 E-beam resist Cas Nr. no nr. not specific not specific Comment
AZ 351B Developer Cas Nr. no nr. not specific not specific Comment
AZ 4562 Photoresist Cas Nr. no nr. not specific not specific Comment
AZ 5214E Photoresist Cas Nr. no nr. not specific not specific Comment
AZ 726MIF developer Cas Nr. no nr. not specific not specific Comment
AZ 726MIF developer (Tromle) Cas Nr. no nr. not specific not specific Comment
AZ MiR 701 (29CPS) Photoresist Cas Nr. No nr. not specific not specific Comment
AZ nLOF 2020 Photoresist Cas Nr. no nr. not specific not specific Comment
Boric Acid powder Cas Nr. 10043-35-3 not specific Analytic Comment
Chrome etch 18 Cas Nr. no nr. not specific not specific Comment
Developer MIBK Methylisobutylketon 4L Cas Nr. 108-10-1 not specific VLSI Comment
DUV42S-6,4 L ultra nowpak W/Closure lid Cas Nr. no nr. not specific Aicello Comment
Ethanol Cas Nr. 64-17-5 99,9%-100% VLSI Comment
Hydrofluoric acid buffer (BHF/BOE) Cas Nr. no nr. 12,5% not specific Comment
Hydrofluoric acid buffer (BHF/BOE W/wetting agent) Cas Nr. no nr. 12,5% not specific Comment
Hexamethyldisilasan Cas Nr. 999-97-3 not specific not specific Comment
HYDROFLUORIC ACID (HF) Cas Nr. no nr. 1% VLSI Comment
Cas Nr. No nr. 10% VLSI Will be removed ones we no longer have any in storage
Cas Nr. no nr. 40% EMSURE® ISO for analysis Comment
Cas Nr. no nr. 50% VLSI Comment
Hydrochloric acid Cas Nr. 7647-01-0 37% VLSI Comment
Hydrogenperoxid Cas Nr. 7722-84-1 31% VLSI Comment
KRF m230Y 6cP Gal Cas Nr. no nr. not specific not specific Comment
KRF M35G 27cP Gal Cas Nr. no nr. not specific not specific Comment
Microposit Remover 1165 Cas Nr. no nr. not specific Grade Comment
Nitric acid Cas Nr. 231-714-2 69% VLSI Comment
Ortho-Phosphoric acid Cas Nr. 7664-38-2 85% VLSI Comment
Potassium hydroxide solution Cas Nr. 1310-58-3 not specific Selectipur Comment
Isoropanol Cas Nr. 67-63-0 not specific VLSi Comment
SU-8 2005 Cas Nr. no .nr not specific not specific Comment
SU-8 2035 Cas Nr. no .nr not specific not specific Comment
SU-8 2075 Cas Nr. no .nr not specific not specific Comment
SU-8 Developer (Mr-dev 600) Cas Nr. no nr. not specific not specific Comment
SU-8 Thinner Cas Nr. no nr. not specific not specific Comment
Sulfamic acid Cas Nr. 5329-14-6 not specific Alkamlimetry Comment
Sulfuric acid Cas Nr. 7664-93-9 95%-97% VLSI Comment
TI spray Cas Nr. no nr. not specific not specific Comment
ZED N50 Cas Nr. no nr. not specific not specific Comment
Triton x-100 Cas Nr. 9002-93-1 not specific not specific Comment
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