Specific Process Knowledge/Etch/Overview of chemicals: Difference between revisions
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{{cc-nanolab}} | |||
'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/Overview_of_chemicals click here]''' | |||
<br> | |||
<br> | |||
=<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>[[image:Under_construction.png|200px]]= | =<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>[[image:Under_construction.png|200px]]= | ||
On this page, an overview over the standard chemicals we have in the Cleanroom, as well as a link to kemibrug.dk for those chemicals. You will also be able to see if there is any change in the chemicals we have or something else about them in the comments. | |||
''All links to kemibrug.dk require a DTU login.'' | |||
{| border="2" cellspacing="0" cellpadding="10" | {| border="2" cellspacing="0" cellpadding="10" | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|Chemical | !style="background:silver; color:black;" align="left"|Chemical | ||
!style="background:LightGrey; color:black;"|Concentration | !style="background:LightGrey; color:black;"|Cas Nr. | ||
!style="background:LightGrey; color:black;"|Concentration | |||
!style="background:LightGrey; color:black;"|Grade | |||
!style="background:WhiteSmoke; color:black"|Comment | !style="background:WhiteSmoke; color:black"|Comment | ||
|- | |- | ||
!style="background:silver; color:black" align="left" | !style="background:silver; color:black;" align="left"|Acetone | ||
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETExFTkhFSlRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 67-64-1] | |||
!style="background:LightGrey; color:black;"|99,8%-100% | |||
!style="background:LightGrey; color:black;"|VLSi | |||
!style="background:WhiteSmoke; color:black"| | |||
|- | |- | ||
|style="background:LightGrey; color:black"| | !style="background:silver; color:black;" align="left"|Ammoniumhydroxyd | ||
|style="background:WhiteSmoke; color:black"| | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier?casnr=1336-21-6&pnr=&KBAOnly=false&SearchInNotes=false&NormalSearchKemikalier=true&NormalSearchKemikalier=false&WildCardSearchKemikalier=false&ExactSearchKemikalier=false&inklNoter=false&selectedLangtidsvirkning= Cas Nr. 1336-21-6] | ||
!style="background:LightGrey; color:black;"|28% | |||
!style="background:LightGrey; color:black;"|VLSI | |||
!style="background:WhiteSmoke; color:black"|Comment | |||
|- | |- | ||
!style="background:silver; color:black" align="left" | !style="background:silver; color:black;" align="left"|Ammoniumperoxodisulfat | ||
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhESUlKRUpFRVRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 7727-54-0] | |||
!style="background:LightGrey; color:black;"|98%-99,1% | |||
!style="background:LightGrey; color:black;"|Analyse | |||
!style="background:WhiteSmoke; color:black"|Comment | |||
|- | |- | ||
|style="background:LightGrey; color:black"| | !style="background:silver; color:black;" align="left"|Anisole Anhydrous | ||
|style="background:WhiteSmoke; color:black"| | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhESU1NTkVKVGQlYzIlODclN2N2JWMyJTgzJTdlJWMyJTg4diVjMiU4OSU3ZSVjMiU4NCVjMiU4MyVjMiU4OCU1ZVlSSQ==#K Cas Nr. 100-66-3] | ||
!style="background:LightGrey; color:black;"|99,7% | |||
!style="background:LightGrey; color:black;"|GPR | |||
!style="background:WhiteSmoke; color:black"|Comment | |||
|- | |- | ||
!style="background:silver; color:black" align="left" | !style="background:silver; color:black;" align="left"|AR-600-546 Developer | ||
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhERkZLSEtGS1RkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.] | |||
!style="background:LightGrey; color:black;"|not specified | |||
!style="background:LightGrey; color:black;"|not specified | |||
!style="background:WhiteSmoke; color:black"|Comment | |||
|- | |- | ||
|style="background:LightGrey; color:black"| | !style="background:silver; color:black;" align="left"|AR-600-71 Remover | ||
|style="background:WhiteSmoke; color:black"| | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhERkZLRkxFRlRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.] | ||
!style="background:LightGrey; color:black;"|not specific | |||
!style="background:LightGrey; color:black;"|not specific | |||
!style="background:WhiteSmoke; color:black"|Comment | |||
|- | |- | ||
| style="background:LightGrey; color:black"| | !style="background:silver; color:black;" align="left"|AR-6200.09 E-beam resist | ||
|style="background:WhiteSmoke; color:black"| | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhERkZLR0xMSVRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.] | ||
!style="background:LightGrey; color:black;"|not specific | |||
!style="background:LightGrey; color:black;"|not specific | |||
!style="background:WhiteSmoke; color:black"|Comment | |||
|- | |||
!style="background:silver; color:black;" align="left"|AZ 351B Developer | |||
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhES01NTUdMRVRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.] | |||
!style="background:LightGrey; color:black;"|not specific | |||
!style="background:LightGrey; color:black;"|not specific | |||
!style="background:WhiteSmoke; color:black"|Comment | |||
|- | |||
!style="background:silver; color:black;" align="left"|AZ 4562 Photoresist | |||
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETEtKSEVKSFRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.] | |||
!style="background:LightGrey; color:black;"|not specific | |||
!style="background:LightGrey; color:black;"|not specific | |||
!style="background:WhiteSmoke; color:black"|Comment | |||
|- | |||
!style="background:silver; color:black;" align="left"|AZ 5214E Photoresist | |||
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETEdKTEdJSFRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.] | |||
!style="background:LightGrey; color:black;"|not specific | |||
!style="background:LightGrey; color:black;"|not specific | |||
!style="background:WhiteSmoke; color:black"|Comment | |||
|- | |||
!style="background:silver; color:black;" align="left"|AZ 726MIF developer | |||
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETkVFTUVGR1RkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.] | |||
!style="background:LightGrey; color:black;"|not specific | |||
!style="background:LightGrey; color:black;"|not specific | |||
!style="background:WhiteSmoke; color:black"|Comment | |||
|- | |||
!style="background:silver; color:black;" align="left"|AZ 726MIF developer (Tromle) | |||
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETkVFTUVGR1RkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.] | |||
!style="background:LightGrey; color:black;"|not specific | |||
!style="background:LightGrey; color:black;"|not specific | |||
!style="background:WhiteSmoke; color:black"|Comment | |||
|- | |||
!style="background:silver; color:black;" align="left"|AZ MiR 701 (29CPS) Photoresist | |||
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhERkVGTU5NSFRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. No nr.] | |||
!style="background:LightGrey; color:black;"|not specific | |||
!style="background:LightGrey; color:black;"|not specific | |||
!style="background:WhiteSmoke; color:black"|Comment | |||
|- | |||
!style="background:silver; color:black;" align="left"|AZ nLOF 2020 Photoresist | |||
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETEtGS0ZNSVRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.] | |||
!style="background:LightGrey; color:black;"|not specific | |||
!style="background:LightGrey; color:black;"|not specific | |||
!style="background:WhiteSmoke; color:black"|Comment | |||
|- | |||
!style="background:silver; color:black;" align="left"|Boric Acid powder | |||
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETUZGS0pJR1RkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 10043-35-3] | |||
!style="background:LightGrey; color:black;"|not specific | |||
!style="background:LightGrey; color:black;"|Analytic | |||
!style="background:WhiteSmoke; color:black"|Comment | |||
|- | |||
!style="background:silver; color:black;" align="left"|Chrome etch 18 | |||
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhES0hHR0pMS1RkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.] | |||
!style="background:LightGrey; color:black;"|not specific | |||
!style="background:LightGrey; color:black;"|not specific | |||
!style="background:WhiteSmoke; color:black"|Comment | |||
|- | |||
!style="background:silver; color:black;" align="left"|Developer MIBK Methylisobutylketon 4L | |||
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETE5FSkVMS1RkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 108-10-1] | |||
!style="background:LightGrey; color:black;"|not specific | |||
!style="background:LightGrey; color:black;"|VLSI | |||
!style="background:WhiteSmoke; color:black"|Comment | |||
|- | |||
!style="background:silver; color:black;" align="left"|DUV42S-6,4 L ultra nowpak W/Closure lid | |||
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhERkdNR0tITVRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.] | |||
!style="background:LightGrey; color:black;"|not specific | |||
!style="background:LightGrey; color:black;"|Aicello | |||
!style="background:WhiteSmoke; color:black"|Comment | |||
|- | |||
!style="background:silver; color:black;" align="left"|Ethanol | |||
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETUpFRklGS1RkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 64-17-5] | |||
!style="background:LightGrey; color:black;"|99,9%-100% | |||
!style="background:LightGrey; color:black;"|VLSI | |||
!style="background:WhiteSmoke; color:black"|Comment | |||
|- | |||
!style="background:silver; color:black;" align="left"|Hydrofluoric acid buffer (BHF/BOE) | |||
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETUdJSUpNS1RkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.] | |||
!style="background:LightGrey; color:black;"|12,5% | |||
!style="background:LightGrey; color:black;"|not specific | |||
!style="background:WhiteSmoke; color:black"|Comment | |||
|- | |||
!style="background:silver; color:black;" align="left"|Hydrofluoric acid buffer (BHF/BOE W/wetting agent) | |||
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETUZKS01LSlRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.] | |||
!style="background:LightGrey; color:black;"|12,5% | |||
!style="background:LightGrey; color:black;"|not specific | |||
!style="background:WhiteSmoke; color:black"|Comment | |||
|- | |||
!style="background:silver; color:black;" align="left"|Hexamethyldisilasan | |||
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhER0VFRkxJVGQlYzIlODclN2N2JWMyJTgzJTdlJWMyJTg4diVjMiU4OSU3ZSVjMiU4NCVjMiU4MyVjMiU4OCU1ZVlSSQ==#K Cas Nr. 999-97-3] | |||
!style="background:LightGrey; color:black;"|not specific | |||
!style="background:LightGrey; color:black;"|not specific | |||
!style="background:WhiteSmoke; color:black"|Comment | |||
|- | |||
!style="background:silver; color:black" align="left" valign="top" rowspan="4"|HYDROFLUORIC ACID (HF) | |||
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETUhLSkpITVRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.] | |||
|style="background:LightGrey; color:black"|1% | |||
!style="background:LightGrey; color:black;"|VLSI | |||
|style="background:WhiteSmoke; color:black"|Comment | |||
|- | |||
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETUhLSkhLTlRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. No nr.] | |||
|style="background:LightGrey; color:black"|10% | |||
!style="background:LightGrey; color:black;"|VLSI | |||
|style="background:WhiteSmoke; color:black"|Will be removed ones we no longer have any in storage | |||
|- | |- | ||
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETUhLSktOTFRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.] | |||
|style="background:LightGrey; color:black"|40% | |||
!style="background:LightGrey; color:black;"|EMSURE® ISO for analysis | |||
|style="background:WhiteSmoke; color:black"|Comment | |||
|- | |||
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhES0pJTEtJR1RkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.] | |||
|style="background:LightGrey; color:black"|50% | |||
!style="background:LightGrey; color:black;"|VLSI | |||
|style="background:WhiteSmoke; color:black"|Comment | |||
|- | |||
!style="background:silver; color:black;" align="left"|Hydrochloric acid | |||
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETElITUpITlRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 7647-01-0] | |||
!style="background:LightGrey; color:black;"|37% | |||
!style="background:LightGrey; color:black;"|VLSI | |||
!style="background:WhiteSmoke; color:black"|Comment | |||
|- | |||
!style="background:silver; color:black;" align="left"|Hydrogenperoxid | |||
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhESUlKRUVISVRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 7722-84-1] | |||
!style="background:LightGrey; color:black;"|31% | |||
!style="background:LightGrey; color:black;"|VLSI | |||
!style="background:WhiteSmoke; color:black"|Comment | |||
|- | |||
!style="background:silver; color:black;" align="left"|KRF m230Y 6cP Gal | |||
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhESkpGSk1GSVRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.] | |||
!style="background:LightGrey; color:black;"|not specific | |||
!style="background:LightGrey; color:black;"|not specific | |||
!style="background:WhiteSmoke; color:black"|Comment | |||
|- | |||
!style="background:silver; color:black;" align="left"|KRF M35G 27cP Gal | |||
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhESkpGSklKRlRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.] | |||
!style="background:LightGrey; color:black;"|not specific | |||
!style="background:LightGrey; color:black;"|not specific | |||
!style="background:WhiteSmoke; color:black"|Comment | |||
|- | |||
!style="background:silver; color:black;" align="left"|Microposit Remover 1165 | |||
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhES0VOSUpFVGQlYzIlODclN2N2JWMyJTgzJTdlJWMyJTg4diVjMiU4OSU3ZSVjMiU4NCVjMiU4MyVjMiU4OCU1ZVlSSQ==#K Cas Nr. no nr.] | |||
!style="background:LightGrey; color:black;"|not specific | |||
!style="background:LightGrey; color:black;"|Grade | |||
!style="background:WhiteSmoke; color:black"|Comment | |||
|- | |||
!style="background:silver; color:black;" align="left"|Nitric acid | |||
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETEpITkVGTFRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 231-714-2] | |||
!style="background:LightGrey; color:black;"|69% | |||
!style="background:LightGrey; color:black;"|VLSI | |||
!style="background:WhiteSmoke; color:black"|Comment | |||
|- | |||
!style="background:silver; color:black;" align="left"|Ortho-Phosphoric acid | |||
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETElMTEdOS1RkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 7664-38-2] | |||
!style="background:LightGrey; color:black;"|85% | |||
!style="background:LightGrey; color:black;"|VLSI | |||
!style="background:WhiteSmoke; color:black"|Comment | |||
|- | |||
!style="background:silver; color:black;" align="left"|Potassium hydroxide solution | |||
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETE1IS0xIRVRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 1310-58-3] | |||
!style="background:LightGrey; color:black;"|not specific | |||
!style="background:LightGrey; color:black;"|Selectipur | |||
!style="background:WhiteSmoke; color:black"|Comment | |||
|- | |||
!style="background:silver; color:black;" align="left"|Isoropanol | |||
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETEhITUlHRlRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 67-63-0] | |||
!style="background:LightGrey; color:black;"|not specific | |||
!style="background:LightGrey; color:black;"|VLSi | |||
!style="background:WhiteSmoke; color:black"|Comment | |||
|- | |||
!style="background:silver; color:black;" align="left"|SU-8 2005 | |||
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhES0lFRUVJVGQlYzIlODclN2N2JWMyJTgzJTdlJWMyJTg4diVjMiU4OSU3ZSVjMiU4NCVjMiU4MyVjMiU4OCU1ZVlSSQ==#K Cas Nr. no .nr] | |||
!style="background:LightGrey; color:black;"|not specific | |||
!style="background:LightGrey; color:black;"|not specific | |||
!style="background:WhiteSmoke; color:black"|Comment | |||
|- | |||
!style="background:silver; color:black;" align="left"|SU-8 2035 | |||
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhES0lFRUVJVGQlYzIlODclN2N2JWMyJTgzJTdlJWMyJTg4diVjMiU4OSU3ZSVjMiU4NCVjMiU4MyVjMiU4OCU1ZVlSSQ==#K Cas Nr. no .nr] | |||
!style="background:LightGrey; color:black;"|not specific | |||
!style="background:LightGrey; color:black;"|not specific | |||
!style="background:WhiteSmoke; color:black"|Comment | |||
|- | |||
!style="background:silver; color:black;" align="left"|SU-8 2075 | |||
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhES0lFRUVJVGQlYzIlODclN2N2JWMyJTgzJTdlJWMyJTg4diVjMiU4OSU3ZSVjMiU4NCVjMiU4MyVjMiU4OCU1ZVlSSQ==#K Cas Nr. no .nr] | |||
!style="background:LightGrey; color:black;"|not specific | |||
!style="background:LightGrey; color:black;"|not specific | |||
!style="background:WhiteSmoke; color:black"|Comment | |||
|- | |||
!style="background:silver; color:black;" align="left"|SU-8 Developer (Mr-dev 600) | |||
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETkdITklFVGQlYzIlODclN2N2JWMyJTgzJTdlJWMyJTg4diVjMiU4OSU3ZSVjMiU4NCVjMiU4MyVjMiU4OCU1ZVlSSQ==#K Cas Nr. no nr.] | |||
!style="background:LightGrey; color:black;"|not specific | |||
!style="background:LightGrey; color:black;"|not specific | |||
!style="background:WhiteSmoke; color:black"|Comment | |||
|- | |||
!style="background:silver; color:black;" align="left"|SU-8 Thinner | |||
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhES0dLRktGVGQlYzIlODclN2N2JWMyJTgzJTdlJWMyJTg4diVjMiU4OSU3ZSVjMiU4NCVjMiU4MyVjMiU4OCU1ZVlSSQ==#K Cas Nr. no nr.] | |||
!style="background:LightGrey; color:black;"|not specific | |||
!style="background:LightGrey; color:black;"|not specific | |||
!style="background:WhiteSmoke; color:black"|Comment | |||
|- | |||
!style="background:silver; color:black;" align="left"|Sulfamic acid | |||
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhESklISUVLS1RkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 5329-14-6] | |||
!style="background:LightGrey; color:black;"|not specific | |||
!style="background:LightGrey; color:black;"|Alkamlimetry | |||
!style="background:WhiteSmoke; color:black"|Comment | |||
|- | |||
!style="background:silver; color:black;" align="left"|Sulfuric acid | |||
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETElMTk1GTFRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 7664-93-9] | |||
!style="background:LightGrey; color:black;"|95%-97% | |||
!style="background:LightGrey; color:black;"|VLSI | |||
!style="background:WhiteSmoke; color:black"|Comment | |||
|- | |||
!style="background:silver; color:black;" align="left"|TI spray | |||
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETUlHSE1NTFRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.] | |||
!style="background:LightGrey; color:black;"|not specific | |||
!style="background:LightGrey; color:black;"|not specific | |||
!style="background:WhiteSmoke; color:black"|Comment | |||
|- | |||
!style="background:silver; color:black;" align="left"|ZED N50 | |||
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhESkpOTUlMVGQlYzIlODclN2N2JWMyJTgzJTdlJWMyJTg4diVjMiU4OSU3ZSVjMiU4NCVjMiU4MyVjMiU4OCU1ZVlSSQ==#K Cas Nr. no nr.] | |||
!style="background:LightGrey; color:black;"|not specific | |||
!style="background:LightGrey; color:black;"|not specific | |||
!style="background:WhiteSmoke; color:black"|Comment | |||
|- | |||
!style="background:silver; color:black;" align="left"|Triton x-100 | |||
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETEdORUlJRlRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 9002-93-1] | |||
!style="background:LightGrey; color:black;"|not specific | |||
!style="background:LightGrey; color:black;"|not specific | |||
!style="background:WhiteSmoke; color:black"|Comment | |||
|- | |||
|} | |} | ||