Specific Process Knowledge/Characterization/Lifetime scanner MDPmap: Difference between revisions
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'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/Lifetime_scanner_MDPmap click here]''' | '''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/Lifetime_scanner_MDPmap click here]''' | ||
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[[image:Lifetimescanner04.jpg|400x400px|right|thumb|Lifetime scanner MPDmap, positioned in cleanroom F-2.]] | |||
[[image:Lifetimescanner04.jpg|400x400px|right|thumb|Lifetime scanner MPDmap, positioned in cleanroom | |||
== Microwave Detected Photoconductivity (MDP) == | == Microwave Detected Photoconductivity (MDP) == | ||
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== Performance information == | == Performance information == | ||
'''Range of lifetimes''': 20 ns to several ms | |||
'''The resistivity range for lifetime measurements''' 0.2 to 100 Ohm.cm, p/n | |||
'''Material''': Silicon, epitaxial layers, partially or fully processed wafers, compound semiconductors and beyond. | |||
'''Measureable properties''': Carrier lifetime (steady state or non equilibrium (µ -PCD) selectable), photoconductivity (steady state) microwave Photoconductance Decay (µ-PCD) | |||
==Equipment performance and process related parameters== | ==Equipment performance and process related parameters== | ||
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